Title:
AUTOMATIC PURGING DEVICE FOR PURGING THE PIPELINE OF A PHOTORESIST COATING AND DEVELOPING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2008/017208
Kind Code:
A1
Abstract:
The present invention provides an automatic purging device for purging the pipeline of a photoresist coating and developing apparatus. The photoresist coating and developing apparatus includes a bubble tank(15), an output pipeline, a pressure meter(13), a flowmeter(11,12), an air actuated valve(14) for feeding/discharging HMDS-air and an air actuated valve (21) for distributing HMDS-air. The automatic purging device for purging the pipeline includes a bi-position threeway air actuated change valve(52) connected to said air actuated valve (14) for feeding/discharging HMDS-air, nitrogen gas pipelines provided between the pressure meter(13) andthe flowmeter(11) and between the pressure meter(13) and the flowmeter(12), and a nitrogen gas pipeline provided at the outlet of the bubble tank(15). According to the present invention, the device has the following advantages: not have to feed cleaning agent to the purged pipelines, to achieve automatically purging the pipelines on holding the condition set by the software, to prevent HMDA leaking, or to prevent abnormal vacuum or a wafer scuffing caused due to falsely fixing a cover.
Inventors:
HUANG, Wei (No.333, Xing Hua Street Suzhou Industrial Par, Suzhou Jiangsu 3, 215123, CN)
黄伟 (中国江苏省苏州市苏州工业园区星华街333号, Jiangsu 3, 215123, CN)
XUE, Wei (No.333, Xing Hua Street Suzhou Industrial Par, Suzhou Jiangsu 3, 215123, CN)
薛伟 (中国江苏省苏州市苏州工业园区星华街333号, Jiangsu 3, 215123, CN)
黄伟 (中国江苏省苏州市苏州工业园区星华街333号, Jiangsu 3, 215123, CN)
XUE, Wei (No.333, Xing Hua Street Suzhou Industrial Par, Suzhou Jiangsu 3, 215123, CN)
薛伟 (中国江苏省苏州市苏州工业园区星华街333号, Jiangsu 3, 215123, CN)
Application Number:
CN2006/001951
Publication Date:
February 14, 2008
Filing Date:
August 03, 2006
Export Citation:
Assignee:
HE JIAN TECHNOLOGY (SUZHOU) CO., LTD. (No.333, Xing Hua Street Suzhou Industrial Par, Suzhou Jiangsu 3, 215123, CN)
和舰科技（苏州）有限公司 (中国江苏省苏州市苏州工业园区星华街333号, Jiangsu 3, 215123, CN)
HUANG, Wei (No.333, Xing Hua Street Suzhou Industrial Par, Suzhou Jiangsu 3, 215123, CN)
黄伟 (中国江苏省苏州市苏州工业园区星华街333号, Jiangsu 3, 215123, CN)
XUE, Wei (No.333, Xing Hua Street Suzhou Industrial Par, Suzhou Jiangsu 3, 215123, CN)
和舰科技（苏州）有限公司 (中国江苏省苏州市苏州工业园区星华街333号, Jiangsu 3, 215123, CN)
HUANG, Wei (No.333, Xing Hua Street Suzhou Industrial Par, Suzhou Jiangsu 3, 215123, CN)
黄伟 (中国江苏省苏州市苏州工业园区星华街333号, Jiangsu 3, 215123, CN)
XUE, Wei (No.333, Xing Hua Street Suzhou Industrial Par, Suzhou Jiangsu 3, 215123, CN)
International Classes:
B08B9/027; C23C16/00; B08B9/02; C23C16/00
Attorney, Agent or Firm:
LIAN & LIEN IP ATTORNEYS (Suite 901, Tower A Huaxin Building, No.33 AndingRoad, Chaoyang District, Beijing 9, 100029, CN)
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