Title:
AUTOMATIC SLIT/GATE VALVE
Document Type and Number:
WIPO Patent Application WO2002005322
Kind Code:
A3
Abstract:
A slit/gate valve (11) is provided. The slit/gate valve comprises a door (23) having a sealing surface (17) adapted to seal an opening (19), a linking mechanism (15) coupled to the door, and an actuator (29) coupled to the linking mechanism, the actuator adapted to move the linking mechanism and the linking mechanism adapted to translate actuation in a first direction into movement of the door in a second direction.
Inventors:
PERLOV ILYA (US)
GANTVARG EUGENE (US)
GANTVARG EUGENE (US)
Application Number:
PCT/US2001/020919
Publication Date:
May 30, 2002
Filing Date:
June 30, 2001
Export Citation:
Assignee:
APPLIED MATERIALS INC (US)
PERLOV ILYA (US)
GANTVARG EUGENE (US)
PERLOV ILYA (US)
GANTVARG EUGENE (US)
International Classes:
F16K3/18; F16K51/02; H01L21/00; (IPC1-7): F16K51/02; H01L21/00
Foreign References:
| US4721282A | 1988-01-26 | |||
| JPH05272662A | 1993-10-19 | |||
| GB2117495A | 1983-10-12 | |||
| JPH10339377A | 1998-12-22 |
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