Title:
AUXILIARY SHEET FOR LASER DICING
Document Type and Number:
WIPO Patent Application WO/2012/077471
Kind Code:
A1
Abstract:
Provided is an auxiliary sheet for laser dicing, that is not fully cut and does not reduce workability even in dicing processes that use a short-wavelength laser. The auxiliary sheet for laser dicing includes: a base material comprising a polyolefin film; and an adhesion layer on one surface of the base material. Said auxiliary sheet is characterized by the total light transmittance in the 300-400 nm wavelength range being 50% min., and the haze in the 300-400 nm wavelength range being 70% min.
Inventors:
MARUYAMA MITSUNORI (JP)
ABE NOBUYUKI (JP)
ABE NOBUYUKI (JP)
Application Number:
PCT/JP2011/076374
Publication Date:
June 14, 2012
Filing Date:
November 16, 2011
Export Citation:
Assignee:
KIMOTO KK (JP)
MARUYAMA MITSUNORI (JP)
ABE NOBUYUKI (JP)
MARUYAMA MITSUNORI (JP)
ABE NOBUYUKI (JP)
International Classes:
H01L21/301; C09J7/24; C09J7/29; C09J7/38; C09J201/00
Foreign References:
| JP2010073897A | 2010-04-02 | |||
| JP2008091765A | 2008-04-17 | |||
| JPH02187478A | 1990-07-23 | |||
| JP2002343747A | 2002-11-29 | |||
| JP2005236082A | 2005-09-02 |
Other References:
See also references of EP 2650912A4
Attorney, Agent or Firm:
OHKURA, Koichiro (JP)
Koichiro Okura (JP)
Koichiro Okura (JP)
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Claims: