AVALANCHE-PHOTODIODE SENSOR AND DISTANCE MEASUREMENT DEVICE

Title:

AVALANCHE-PHOTODIODE SENSOR AND DISTANCE MEASUREMENT DEVICE

Document Type and Number:

WIPO Patent Application WO/2020/170841

Kind Code:

A1

Abstract:

The purpose of the present invention is to improve distance measurement accuracy. An avalanche-photodiode sensor according to an embodiment comprises a first semiconductor substrate (51) and a second semiconductor substrate (52) joined to a first surface of the first semiconductor substrate. The first semiconductor substrate comprises a plurality of photoelectric conversion units (21) arranged in matrix and an element isolation unit (157) that performs element isolation of the plurality of photoelectric conversion units. The plurality of photoelectric conversion units include a first photoelectric conversion unit (21). The element isolation unit has a first element isolation area (157A) and a second element isolation area (157B). The first photoelectric conversion unit is disposed between the first element isolation area and the second element isolation area. The first semiconductor substrate is arranged on a second surface opposite to the first surface and further comprises a plurality of uneven portions (181) arranged between the first element isolation area and the second element isolation area. The second semiconductor substrate comprises a readout circuit (22) connected to the respective photoelectric conversion units.

Inventors:

YAGI SHINICHIRO (JP)
WAKANO TOSHIFUMI (JP)

Application Number:

PCT/JP2020/004602

Publication Date:

August 27, 2020

Filing Date:

February 06, 2020

Export Citation:

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Assignee:

SONY SEMICONDUCTOR SOLUTIONS CORP (JP)

International Classes:

H01L31/107; G01S7/481; G01S17/89; H01L21/3205; H01L21/768; H01L23/522; H01L27/146

Domestic Patent References:

WO2017038542A1	2017-03-09
WO2018042785A1	2018-03-08

Foreign References:

US20180090526A1	2018-03-29
JP2018088488A	2018-06-07

Other References: