Title:
BAND-NARROWING MODULE, GAS LASER DEVICE, AND METHOD FOR MANUFACTURING ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2020/174582
Kind Code:
A1
Abstract:
Provided is a band-narrowing module comprising: a prism including an incident side surface on which light is incident, an emitting side surface from which light is emitted, an incident side surface, and a bottom surface, the prism subjecting the light incident on the incident side surface to wavelength dispersion and emitting the light from the emitting side surface; a holder portion fixing the bottom surface of the prism on a fixing surface; a rotating mechanism unit which includes a rotating stage for fixing the holder portion and causing the prism to rotate about an axis perpendicular to a dispersion plane of the light emitted from the prism; a drive unit for rotating the rotating stage; and a grating for reflecting the light emitted from the prism. The center of gravity of the prism, the center of gravity of the holder portion, and the center of gravity of the rotating stage may be positioned on the axis.
Inventors:
IGARASHI MIWA (JP)
MATSUMOTO SHINICHI (JP)
MATSUMOTO SHINICHI (JP)
Application Number:
PCT/JP2019/007315
Publication Date:
September 03, 2020
Filing Date:
February 26, 2019
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/137
Domestic Patent References:
| WO2018061098A1 | 2018-04-05 | |||
| WO2018061210A1 | 2018-04-05 |
Foreign References:
| US20180107017A1 | 2018-04-19 | |||
| JP2015175611A | 2015-10-05 | |||
| JPH04129119U | 1992-11-25 | |||
| JPH064893A | 1994-01-14 | |||
| JPH0596911U | 1993-12-27 | |||
| JP2007201121A | 2007-08-09 | |||
| JP2001350006A | 2001-12-21 | |||
| JP2005352037A | 2005-12-22 |
Attorney, Agent or Firm:
MORIMURA Yasuo (JP)
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