Title:
BASAL PLATE DEFORMATION DETECTING SYSTEM AND DEFORMATION DETECTING METHOD
Document Type and Number:
WIPO Patent Application WO/2007/136066
Kind Code:
A1
Abstract:
The subject matter is related to a deformation detecting system for inspecting
and detecting deformations of a basal plate with front and rear flat surfaces
that are in parallel with each other in a non-deformed state. The system is provided
with supporting members (122A-122C) to support a basal plate (W) in a substantially
horizontal standard position and first and second optical sensors. The first
sensors (161) define a first optical path (L1) passing immediately over the front
surface of the basal plate in the case that the basal plate is in a non-deformed
state and is supported by the supporting members. The second sensors (162) define
a second optical path (L2) passing immediately under the rear surface of the basal
plate in the case that the basal plate is in a non-deformed state and is supported
by the supporting members.The first and second sensors detect cutoffs of the
first and second optical paths due to the subject basal plate supported by the
supporting members, respectively. The system is provided with a deformation
judging means (143) for judging deformations of the basal plate whether or not
such deformations are larger in magnitude than the standard degree of deformations
in accordance with detecting information of the optical sensors (161, 162).
Inventors:
MORI KOHEI (JP)
KUME JYUNJI (JP)
KUME JYUNJI (JP)
Application Number:
PCT/JP2007/060453
Publication Date:
November 29, 2007
Filing Date:
May 22, 2007
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
MORI KOHEI (JP)
KUME JYUNJI (JP)
MORI KOHEI (JP)
KUME JYUNJI (JP)
International Classes:
H01L21/66
Foreign References:
| JP2004119673A | 2004-04-15 | |||
| JP2005158809A | 2005-06-16 |
Attorney, Agent or Firm:
YOSHITAKE, Kenji et al. (Room 323 Fuji Bldg., 2-3, Marunouchi 3-chom, Chiyoda-ku Tokyo 05, JP)
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