Title:
BEAM DUMP DEVICE, LASER DEVICE PROVIDED WITH SAME, AND EXTREME ULTRAVIOLET LIGHT GENERATION DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/135965
Kind Code:
A1
Abstract:
A beam dump device according to one embodiment of the present disclosure is provided with an attenuator module, a beam dump module, and a control unit for controlling the attenuator module and the beam dump module. The attenuator module includes the following: a first beam splitter which is disposed inclined, with respect to the light axis, at a first angle; a second beam splitter which is disposed inclined, with respect to the light axis, at a second angle which has an absolute value equal to the first angle and has a sign opposite thereto; a first beam damper on which the laser light reflected by the first beam splitter is incident; a second beam damper on which the laser light reflected by the second beam splitter is incident; and a first stage on which the first and second beam splitters are inserted into or retracted from the light path of the laser light. The beam dump module may include the following: a mirror which is disposed inclined with respect to the light axis of the laser light; a third beam damper on which the laser light reflected by the mirror is incident; and a second stage on which the mirror is inserted into or retracted from the light path.
Inventors:
KUROSAWA YOSHIAKI (JP)
SUGANUMA TAKASHI (JP)
SUGANUMA TAKASHI (JP)
Application Number:
PCT/JP2015/055930
Publication Date:
September 01, 2016
Filing Date:
February 27, 2015
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
H01S3/10; G02B26/02; H01L21/027; H05G2/00
Foreign References:
| JP2010226096A | 2010-10-07 | |||
| JP2013098239A | 2013-05-20 | |||
| JP2004173774A | 2004-06-24 | |||
| JP2013524512A | 2013-06-17 | |||
| JP2000261076A | 2000-09-22 | |||
| JP2014221486A | 2014-11-27 |
Attorney, Agent or Firm:
YANAGIDA Masashi et al. (JP)
Seiji Yanagida (JP)
Seiji Yanagida (JP)
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