Title:
BEAM SCANNING DEVICE AND PATTERN DRAWING DEVICE
Document Type and Number:
WIPO Patent Application WO/2018/066286
Kind Code:
A1
Abstract:
A drawing unit (Un) is provided with an fθ lens system (FT) on which a processing beam (LBn) deflected by a reflective surface (RP) of a polygon mirror (PM) having a variable angle becomes incident, and which condenses the processing beam (LBn) on a substrate (P) as a spot light (SP). The spot light (SP) is scanned in accordance with the change in the angle of the reflective surface (RP) of the polygon mirror (PM). The drawing unit (Un) is provided with: a beam transmission part (60a) which projects, on the reflective surface (RP) of the polygon mirror (PM), a beam (Bga) for detecting a starting point at which the reflective surface (RP) of the polygon mirror (PM) has a prescribed angle; a reflecting mirror (MRa) on which the beam (Bgb) reflected by the reflective surface (RP) becomes incident, and which reflects said beam towards the reflective surface (RP); and a detection unit (60b) which outputs a starting point signal (SZn) on the basis of the beam (Bgd) reflected again by the reflective surface (RP).
Inventors:
KATO MASAKI (JP)
KITO YOSHIAKI (JP)
KITO YOSHIAKI (JP)
Application Number:
PCT/JP2017/031737
Publication Date:
April 12, 2018
Filing Date:
September 04, 2017
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G02B26/12; G02B26/10
Foreign References:
| JPH08507410A | 1996-08-06 | |||
| JP2005275399A | 2005-10-06 | |||
| JPH08110488A | 1996-04-30 | |||
| JPH09159945A | 1997-06-20 | |||
| JP2000507003A | 2000-06-06 | |||
| US6119942A | 2000-09-19 |
Attorney, Agent or Firm:
CHIBA Yoshihiro et al. (JP)
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