Title:
BEAM SPLITTER USING MULTI-REFRACTIVE INDEX LAYER AND DEFECTIVE ELEMENT DETECTING DEVICE COMPRISING SAME
Document Type and Number:
WIPO Patent Application WO/2023/113226
Kind Code:
A1
Abstract:
An embodiment of the present invention provides: a beam splitter using a multi-refractive index layer, which allows infrared light to transmit therethrough and visible light to be reflected thereby, and thus enables high-magnification measurement; and a defective element detection device comprising same. The beam splitter using a multi-refractive index layer comprises a multi-refractive index layer and a base layer. The multi-refractive index layer reflects a first light and transmits a second light having a longer wavelength than the first light. The base layer is provided on one surface of the multi-refractive index layer and transmits the second light passing through the multi-refractive index layer. The multi-refractive index layer comprises a first refractive index layer having a first refractive index and a second refractive index layer having a second refractive index lower than the first refractive index, and the first refractive index layer and the second refractive index layer are disposed alternately and repeatedly. The wavelength of the second light is ten times or more than the wavelength of the first light.
Inventors:
LIM MI KYUNG (KR)
KIM JAE HYUN (KR)
JANG BONG KYUN (KR)
KIM KYUNG SIK (KR)
KIM HYEON DON (KR)
LEE HAK JOO (KR)
KIM JAE HYUN (KR)
JANG BONG KYUN (KR)
KIM KYUNG SIK (KR)
KIM HYEON DON (KR)
LEE HAK JOO (KR)
Application Number:
PCT/KR2022/017074
Publication Date:
June 22, 2023
Filing Date:
November 02, 2022
Export Citation:
Assignee:
KOREA INST MACH & MATERIALS (KR)
CT ADVANCED META MAT (KR)
CT ADVANCED META MAT (KR)
International Classes:
G02B27/12; G02B27/10
Domestic Patent References:
| WO2020247292A1 | 2020-12-10 |
Foreign References:
| KR20090077489A | 2009-07-15 | |||
| KR102068516B1 | 2020-01-21 | |||
| KR101533588B1 | 2015-07-03 | |||
| US20190353836A1 | 2019-11-21 |
Attorney, Agent or Firm:
HONESTY & JR PARTNERS INTELLECTUAL PROPERTY LAW GROUP (KR)
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