Title:
BEAM TRANSMISSION SYSTEM, EXPOSURE DEVICE, AND ILLUMINATION OPTICAL SYSTEM FOR EXPOSURE DEVICE
Document Type and Number:
WIPO Patent Application WO/2017/145385
Kind Code:
A1
Abstract:
The present invention makes it possible to set the polarization direction of illumination light on the illumination surface of the exposure device more freely. This beam transmission system (121), which transmits a linearly polarized light beam (L) output from a free electron laser device (10) to an exposure device (130), includes a light beam splitting unit (50) that splits the light beam (L) into a first light beam (L1) and a second light beam (L2), and a first polarization direction turning unit (51) that causes the linear polarization direction of the first light beam (L1) to turn.
Inventors:
SUZUKI AKIYOSHI (JP)
WAKABAYASHI OSAMU (JP)
WAKABAYASHI OSAMU (JP)
Application Number:
PCT/JP2016/055921
Publication Date:
August 31, 2017
Filing Date:
February 26, 2016
Export Citation:
Assignee:
GIGAPHOTON INC (JP)
International Classes:
G03F7/20; H05H13/04
Domestic Patent References:
| WO2011096453A1 | 2011-08-11 | |||
| WO2014128010A2 | 2014-08-28 | |||
| WO2016051518A1 | 2016-04-07 |
Foreign References:
| JP2010502003A | 2010-01-21 | |||
| JP2009105396A | 2009-05-14 | |||
| JP2012142460A | 2012-07-26 | |||
| JP2015534132A | 2015-11-26 | |||
| JP2003133212A | 2003-05-09 | |||
| JPH04120717A | 1992-04-21 | |||
| JP2015511064A | 2015-04-13 | |||
| JPH05114548A | 1993-05-07 | |||
| JPH05283320A | 1993-10-29 | |||
| JP2005303084A | 2005-10-27 | |||
| JP2013053850A | 2013-03-21 | |||
| US20060146384A1 | 2006-07-06 |
Attorney, Agent or Firm:
YANAGIDA, Masashi et al. (JP)
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