Title:
BEARING COMPONENT OF SEMICONDUCTOR DEVICE HOUSING APPARATUS
Document Type and Number:
WIPO Patent Application WO/2023/045596
Kind Code:
A1
Abstract:
The present invention provides a bearing component of a semiconductor device housing apparatus, which is used to bear a semiconductor device housing apparatus and comprises: a bearing cantilever, a supporting assembly that is connected to the bearing cantilever, and a first driving apparatus. The bearing cantilever comprises a bearing portion that bears the semiconductor device housing apparatus, a connecting plate and a substrate. The bearing portion consists of a horizontally-plugged bearing plate and a bearing support frame. The bottom portion of the semiconductor device housing apparatus forms an opening that exposes a semiconductor device. The bearing plate is arranged located below the opening and has a rotatable rotating rod. The rotating rod makes contact with the edge of the semiconductor device. The first driving apparatus drives, by means of a kinetic force transmission member, the rotating rod to rotate, so as to apply, by means of the rotating rod, a rotational force to the edge of the semiconductor device inserted into the semiconductor device housing apparatus. The present invention effectively solves the technical problem that chemical glue and particles cannot be effectively removed from the edge of a semiconductor device that makes contacts with an inner wall surface of a slot, and also achieves uniformity of wet etching.
Inventors:
HUA BIN (CN)
SUN XIANMIAO (CN)
SHI XINYU (CN)
LI WENXUAN (CN)
SUN XIANMIAO (CN)
SHI XINYU (CN)
LI WENXUAN (CN)
Application Number:
PCT/CN2022/111084
Publication Date:
March 30, 2023
Filing Date:
August 09, 2022
Export Citation:
Assignee:
ZHICHENG SEMICONDUCTOR EQUIPMENT TECH KUNSHAN CO LTD (CN)
International Classes:
H01L21/673; B08B11/00; B08B13/00; H01L21/67
Foreign References:
| CN113571455A | 2021-10-29 | |||
| CN212412013U | 2021-01-26 | |||
| JP2002141321A | 2002-05-17 | |||
| CN105336649A | 2016-02-17 | |||
| CN204361059U | 2015-05-27 |
Attorney, Agent or Firm:
NANJING SUGAO PATENT AND TRADEMARK FIRM (ORDINARY PARTNERSHIP) (CN)
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