Title:
BENZOCYCLOBUTENE MONOMER, BENZOCYCLOBUTENE RESIN, PREPARATION METHOD THEREFOR, LOW DIELECTRIC CONSTANT MATERIAL, AND SEMICONDUCTOR DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/242292
Kind Code:
A1
Abstract:
Provided in the present application is a benzocyclobutene monomer, which has structural formula (I), wherein two R1s are separately independently selected from a hydrogen atom, a methyl group, a methoxy group, an ethyl group, and an ester group; R2 is selected from a hydrogen atom, a methyl group, a methoxy group, and an ester group; R3 is selected from a phenyl group, a naphthyl group, a biphenyl group, an aromatic alkyl group, and an aliphatic chain containing 1-10 carbon atoms; R4 is selected from a hydrogen atom, a methyl group, a methoxy group, an ethyl group, and an ester group; and R5 is selected from a hydrogen atom, a methyl group, and a methoxy group. Further provided in the present application are a preparation method for a benzocyclobutene monomer, a benzocyclobutene resin and a preparation method therefor, a low dielectric constant composite material, and a semiconductor device. The benzocyclobutene monomer is multifunctional, a preparation condition is mild, preparation is easy, and costs are low. The benzocyclobutene monomer forms a benzocyclobutene resin by means of prepolymerization, the benzocyclobutene resin has a high cross-link density, a uniquely superior heat resistance, an extremely low coefficient of thermal expansion, and an extremely low dielectric loss.
Inventors:
CHANG TONGXIN (CN)
CAI LI (CN)
GAO FENG (CN)
YANG JUNXIAO (CN)
CAI LI (CN)
GAO FENG (CN)
YANG JUNXIAO (CN)
Application Number:
PCT/CN2022/081757
Publication Date:
November 24, 2022
Filing Date:
March 18, 2022
Export Citation:
Assignee:
HUAWEI TECH CO LTD (CN)
International Classes:
C07C13/44; C07C2/76; C08F12/34
Other References:
YANG, JUN-XIAO: "Studies on the Synthesis of Benzocyclobutene and Bisbenzocyclobutenes", CHINESE MASTER’S THESES FULL-TEXT DATABASE, ENGINEERING SCIENCE & TECHNOLOGY, no. 2, 15 December 2002 (2002-12-15), pages 1 - 58, XP093008654, ISSN: 1671-6779
DONG, NING: "Synthesis of Vinyl-Bridged Bis-Benzocyclobutene", JOURNAL OF SOUTH-CENTRAL COLLEGE FOR NATIONALITIES(NATURAL SCIENCES), vol. 24, no. 1, 30 March 2005 (2005-03-30), pages 24 - 27, XP093008658, ISSN: 1672-4321
DONG, NING: "Synthesis of Vinyl-Bridged Bis-Benzocyclobutene", JOURNAL OF SOUTH-CENTRAL COLLEGE FOR NATIONALITIES(NATURAL SCIENCES), vol. 24, no. 1, 30 March 2005 (2005-03-30), pages 24 - 27, XP093008658, ISSN: 1672-4321
Attorney, Agent or Firm:
SHENZHEN SCIENBIZIP INTELLECTUAL PROPERTY AGENCY CO.,LTD. (CN)
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