Title:
BI-STABLE MEMS CANTILEVER HEAT HARVESTER
Document Type and Number:
WIPO Patent Application WO/2017/135119
Kind Code:
A1
Abstract:
A bi-stable micro-electrical mechanical system (MEMS) heat harvester is provided. A bi-stable MEMS cantilever located between a hot temperature surface and a cold temperature surface, and is made up of a first MEMS material layer, having a first coefficient of thermal expansion. A second MEMS material layer is in contact with the first MEMS material layer, and has a second coefficient of thermal expansion less than the first coefficient of thermal expansion. A tensioner, made from a material having a tensile stress greater than the stress of the first or second MEMS materials, is connected to the cantilever. The heat harvester also includes a mechanical-to-electrical power converter, which may be a piezoelectric device or an electret device. The bi-stable MEMS cantilever may include a thermal expander having a coefficient of thermal expansion greater than the second coefficient of thermal expansion. The thermal expander is connected to the tensioner.
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Inventors:
ZHAN CHANGQING
PAN WEI
YUAN HAO-CHIH
PAN WEI
YUAN HAO-CHIH
Application Number:
PCT/JP2017/002525
Publication Date:
August 10, 2017
Filing Date:
January 25, 2017
Export Citation:
Assignee:
SHARP KK (JP)
International Classes:
H01L35/00; H02N11/00
Foreign References:
| US20090315335A1 | 2009-12-24 | |||
| JP2015220808A | 2015-12-07 |
Attorney, Agent or Firm:
HARAKENZO WORLD PATENT & TRADEMARK (JP)
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