Title:
BIAXIALLY ALIGNED POLYESTER FILM FOR DRY FILM RESIST SUPPORT BODY
Document Type and Number:
WIPO Patent Application WO/2024/029384
Kind Code:
A1
Abstract:
[Problem] To provide a biaxially aligned polyester film for a dry film resist support body, the biaxially aligned polyester film having: excellent processing suitability when subjected to a high-temperature laminating process with respect to a film for a dry-film resist, as a result of controlling the thermal dimensional change rate in a specific temperature range; and excellent productivity and optical characteristics as a result of controlling the surface profile and the diameters of particles contained in the surface layers on both sides. [Solution] Provided is a biaxially aligned polyester film for a dry film resist support body, configured such that when the film dimensional change rate when the film temperature is raised from 90°C to 130°C is expressed as ΔL90-130°C (ppm/°C), the value at least in one direction is -50 to 150. The total film thickness of the biaxially aligned polyester film is 11 μm to 50 μm.
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Inventors:
SENDAI TOSHIHIRO (JP)
HIGASHIOJI TAKUJI (JP)
HIGASHIOJI TAKUJI (JP)
Application Number:
PCT/JP2023/026984
Publication Date:
February 08, 2024
Filing Date:
July 24, 2023
Export Citation:
Assignee:
TORAY INDUSTRIES (JP)
International Classes:
B29C55/12; B32B27/20; B32B27/36; C08J5/18; C08J7/04; G03F7/09; B29K67/00; B29L9/00
Foreign References:
| JP2018123318A | 2018-08-09 | |||
| JP2021054055A | 2021-04-08 |
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