BIMORPH PIEZOELECTRIC DEVICE FOR ACCELERATION SENSOR AND METHOD OF ITS MANUFACTURE

Title:

BIMORPH PIEZOELECTRIC DEVICE FOR ACCELERATION SENSOR AND METHOD OF ITS MANUFACTURE

Document Type and Number:

WIPO Patent Application WO/1999/002995

Kind Code:

A1

Abstract:

A bimorph piezoelectric acceleration sensor used for sensing the vibration of any of various types of devices such as a hard-disc drive, a CD-ROM drive, etc., which is small in size, high in sensitivity, reduced in variation of sensitivity and low in cost and is produced by grinding a blank of lithium niobate to form a free-vibration part and a support integrally and simultaneously. Two lithium niobate single crystal plates are directly joined to each other in such a way that the directions of polarization are opposite to each other to form a free-vibration part (32a) whose one side is ground to be used as the (32a), while a non-ground part is used as a support (33a), and electrodes (31a and 31b) are formed by electroless plating.

Inventors:

NISHIHARA KAZUNARI (JP)
KUBOTA KIYOTOMO (JP)
TAJIKA HIROHUMI (JP)
NOMURA KOJI (JP)
SHIMAMURA TETSURO (JP)
SASAKI YUKINORI (JP)
YAMAGUCHI MASAKO (JP)

Application Number:

PCT/JP1998/003101

Publication Date:

January 21, 1999

Filing Date:

July 10, 1998

Export Citation:

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Assignee:

MATSUSHITA ELECTRIC IND CO LTD (JP)
NISHIHARA KAZUNARI (JP)
KUBOTA KIYOTOMO (JP)
TAJIKA HIROHUMI (JP)
NOMURA KOJI (JP)
SHIMAMURA TETSURO (JP)
SASAKI YUKINORI (JP)
YAMAGUCHI MASAKO (JP)

International Classes:

B06B1/06; G01H11/08; G01P15/08; G01P15/09; H01L41/08; H01L41/113; H01L41/22; (IPC1-7): G01P15/09; G01L9/08; G01L1/16; H01L41/22

Foreign References:

JPH04295770A	1992-10-20
JPH0926433A	1997-01-28
JPH09243656A	1997-09-19
JPH05172680A	1993-07-09

Other References: