BIMORPH SWITCH, METHOD OF PRODUCING THE BIMORPH SWITCH, ELECTRONIC CIRCUIT, AND METHOD OF PRODUCING THE ELECTRONIC CIRCUIT

Title:

BIMORPH SWITCH, METHOD OF PRODUCING THE BIMORPH SWITCH, ELECTRONIC CIRCUIT, AND METHOD OF PRODUCING THE ELECTRONIC CIRCUIT

Document Type and Number:

WIPO Patent Application WO/2004/010449

Kind Code:

A1

Abstract:

A bimorph switch electrically connecting a movable contact point and a fixed contact point. The switch comprises a substrate having a front face, a back face, and a through hole penetrating from the front face to the back face; a fixed contact point extending from an edge portion of the opening of the through hole to the inside of the opening; and a bimorph portion holding the movable contact point at a position opposed to the opening and driving the movable contact point. One end of the bimorph portion may be formed on a silicon oxide layer formed on a surface of the substrate.

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Inventors:

Sanpei, Hirokazu c/o ADVANTEST CORPORATION (1-32-1 Asahi-ch, Nerima-ku Tokyo, 179-0071, JP)
Mizuno, Jun c/o ADVANTEST CORPORATION (1-32-1 Asahi-ch, Nerima-ku Tokyo, 179-0071, JP)
Yasuoka, Masazumi c/o ADVANTEST CORPORATION (1-32-1 Asahi-ch, Nerima-ku Tokyo, 179-0071, JP)
Takayanagi, Humikazu c/o ADVANTEST CORPORATION (1-32-1 Asahi-ch, Nerima-ku Tokyo, 179-0071, JP)
Takoshima, Takehisa c/o ADVANTEST CORPORATION (1-32-1 Asahi-ch, Nerima-ku Tokyo, 179-0071, JP)
Miyazaki, Masaru c/o ADVANTEST CORPORATION (1-32-1 Asahi-ch, Nerima-ku Tokyo, 179-0071, JP)
Esashi, Masayoshi (1-11-9, Yagiyama-minami Taihaku-k, Sendai-shi Miyagi, 982-0807, JP)

Application Number:

PCT/JP2003/007905

Publication Date:

January 29, 2004

Filing Date:

June 23, 2003

Export Citation:

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Assignee:

ADVANTEST CORPORATION (1-32-1, Asahi-cho Nerima-ku, Tokyo, 179-0071, JP)
Sanpei, Hirokazu c/o ADVANTEST CORPORATION (1-32-1 Asahi-ch, Nerima-ku Tokyo, 179-0071, JP)
Mizuno, Jun c/o ADVANTEST CORPORATION (1-32-1 Asahi-ch, Nerima-ku Tokyo, 179-0071, JP)
Yasuoka, Masazumi c/o ADVANTEST CORPORATION (1-32-1 Asahi-ch, Nerima-ku Tokyo, 179-0071, JP)
Takayanagi, Humikazu c/o ADVANTEST CORPORATION (1-32-1 Asahi-ch, Nerima-ku Tokyo, 179-0071, JP)
Takoshima, Takehisa c/o ADVANTEST CORPORATION (1-32-1 Asahi-ch, Nerima-ku Tokyo, 179-0071, JP)
Miyazaki, Masaru c/o ADVANTEST CORPORATION (1-32-1 Asahi-ch, Nerima-ku Tokyo, 179-0071, JP)
Esashi, Masayoshi (1-11-9, Yagiyama-minami Taihaku-k, Sendai-shi Miyagi, 982-0807, JP)

International Classes:

B81B3/00; B81C1/00; H01H37/14; H01H37/52; H01H51/22; H01H61/00; H01L27/00; H01L41/09; H01H1/00; (IPC1-7): H01H37/52; H01H61/01

Attorney, Agent or Firm:

Ryuka, Akihiro (6F Toshin Building, 24-12 Shinjuku 1-chom, Shinjuku-ku Tokyo, 160-0022, JP)

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