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Title:
BIMORPH SWITCH
Document Type and Number:
WIPO Patent Application WO/2008/038339
Kind Code:
A1
Abstract:
Bimorph switch (1A) comprising substrate (10) equipped with fixed contact (11) and bimorph beam (20A) equipped at its distal end (43) with traveling contact (44), wherein the bimorph beam (20A) includes first bimorph part (40) furnished with Si layer (30) and first Cu layer (41) and, interposed between the two layers (30,41), thin-film heater (42); second bimorph part (50) furnished with Si layer (30) and second Cu layer (51) having no heater interposed between the two layers (30,51); and third bimorph part (60) furnished with Si layer (30) and third Cu layer (61) having no heater interposed between the two layers (30,61).

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Inventors:
NISHIURA, Koei (32-1 Asahicho 1-chome,Nerima-k, Tokyo 71, 1790071, JP)
Application Number:
JP2006/319058
Publication Date:
April 03, 2008
Filing Date:
September 26, 2006
Export Citation:
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Assignee:
ADVANTEST CORPORATION (32-1, Asahicho 1-chome Nerima-k, Tokyo 71, 1790071, JP)
株式会社アドバンテスト (〒71 東京都練馬区旭町一丁目３２番１号 Tokyo, 1790071, JP)
International Classes:
H01H61/00; B81B3/00; H01H37/52
Attorney, Agent or Firm:
TOKOSHIE PATENT FIRM (Nishishinjyuku KF Bldg. 704, 14-24 Nishishinjyuku 8-chom, Shinjyuku-ku Tokyo, 160-0023, JP)
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