Title:
BIOLOGICAL PROBE BASED ON MULTI-COLOR RESONANT CAVITY LIGHT-EMITTING DIODES AND PREPARATION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2024/017092
Kind Code:
A1
Abstract:
The present disclosure provides a preparation method for a biological probe based on multi-color resonant cavity light-emitting diodes, comprising: bonding, on a substrate, a plurality of single-color resonant cavity light-emitting diodes having different light-emission wavelengths to form a biological probe precursor, bonding each single-color resonant cavity light-emitting diode comprising: forming a first bonding metal layer on the substrate; sequentially forming a first reflective layer and a second bonding metal layer on a sapphire epitaxial wafer; flip-chip mounting the sapphire epitaxial wafer, and bonding the first bonding metal layer and the second bonding metal layer to form a third bonding metal layer; etching the flip-chipped sapphire epitaxial wafer, and obtaining an epitaxial layer; forming an insulating layer on the epitaxial layer; forming an N electrode and a P electrode on the insulating layer, which are suitable for applying voltage to the epitaxial layer so as to generate a laser; and forming a second reflective layer on the insulating layer, the second reflective layer and the first reflective layer forming a resonant cavity for controlling the laser light emitting angle; sharpening a tip of the biological probe precursor, and obtaining a biological probe; and forming a biological encapsulation layer on the surface of the biological probe.
Inventors:
YI XIAOYAN (CN)
ZHOU BINRU (CN)
ZHANG YIYUN (CN)
LIU ZHIQIANG (CN)
WANG JUNXI (CN)
LI JINMIN (CN)
ZHOU BINRU (CN)
ZHANG YIYUN (CN)
LIU ZHIQIANG (CN)
WANG JUNXI (CN)
LI JINMIN (CN)
Application Number:
PCT/CN2023/106759
Publication Date:
January 25, 2024
Filing Date:
July 11, 2023
Export Citation:
Assignee:
INST SEMICONDUCTORS CAS (CN)
International Classes:
H01L33/00; A61N5/06; H01L25/075; H01L33/46
Domestic Patent References:
| WO2022094801A1 | 2022-05-12 |
Foreign References:
| CN115224168A | 2022-10-21 | |||
| US20210033559A1 | 2021-02-04 | |||
| CN106848838A | 2017-06-13 | |||
| CN113299806A | 2021-08-24 | |||
| TW200929758A | 2009-07-01 | |||
| US20200035843A1 | 2020-01-30 |
Attorney, Agent or Firm:
CHINA SCIENCE PATENT & TRADEMARK AGENT LTD. (CN)
Download PDF: