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Title:
BIOMIMETIC BASED PRESSURE SENSOR MANUFACTURING METHOD AND PRESSURE SENSOR MANUFACTURED THEREBY
Document Type and Number:
WIPO Patent Application WO/2016/153155
Kind Code:
A1
Abstract:
A biomimetic-based pressure sensor manufacturing method according to the present invention comprises: (a) a step of forming a plurality of micropillars on each of a pair of PDMS substrates from a silicon microhole pattern; (b) a step of growing nanowire in a plurality of micropillars formed on the pair of PDMS substrates; (c) a step of partially coating any one of the pair of PDMS substrates, in which the nanowire has grown in the micropillars, with a metal film; and (d) a step of engaging the PDMS substrates in which the nanowire has grown, among the pair of PDMS substrates, with the PDMS substrate which has been partially coated with the metal film in step (c). The method is effective in improving the performance as a pressure sensor by maximizing the surface area and enabling effective pressure transmission.

Inventors:
KO HYUN HYUB (KR)
HA MIN JEONG (KR)
Application Number:
PCT/KR2015/014384
Publication Date:
September 29, 2016
Filing Date:
December 29, 2015
Export Citation:
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Assignee:
UNIST(ULSAN NAT INST OF SCIENCE AND TECHNOLOGY) (KR)
International Classes:
G01L1/00; B81C1/00; B82B1/00; G01L1/16; G01L1/20
Foreign References:
KR101486217B12015-02-06
KR20090037574A2009-04-16
KR20130066138A2013-06-20
KR20120067249A2012-06-25
Other References:
QIN ET AL.: "Microfibre-nanowire Hybrid Structure for Energy Scavenging", NATURE, vol. 451, no. 7180, 14 February 2008 (2008-02-14), pages 809 - 813, XP055155477
Attorney, Agent or Firm:
HAN, Sang min et al. (KR)
한상민 (KR)
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