Title:
BIPOLAR ELECTROSTATIC CHUCK MODULE AND PRODUCTION METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2017/150574
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a bipolar electrostatic chuck that has a fine hair structure in an attachment surface and that can be used for a thin film dielectric such as a plastic sheet. The bipolar electrostatic chuck module is configured such that a fine hair structure is provided to an electrostatic chuck attachment surface to which an attachment object is to be attached, an insulating layer is disposed between the positive electrode and the negative electrode at the tip of a fine hair on the attachment surface, and an electrostatic force is generated when a voltage is applied between the positive electrode and the negative electrode to cause the attachment object to attach to the electrostatic chuck attachment surface.
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Inventors:
SAITO SHIGEKI (JP)
KAWANO KENTO (JP)
TAJIRI YOSUKE (JP)
TAKAHASHI KUNIO (JP)
DHELIKA RADON (JP)
KAWANO KENTO (JP)
TAJIRI YOSUKE (JP)
TAKAHASHI KUNIO (JP)
DHELIKA RADON (JP)
Application Number:
PCT/JP2017/007987
Publication Date:
September 08, 2017
Filing Date:
February 28, 2017
Export Citation:
Assignee:
TOKYO INST TECH (JP)
International Classes:
H02N13/00
Foreign References:
| JP4961554B2 | 2012-06-27 |
Other References:
KEISUKE MAEZ ONO ET AL.: "Sokyoku-gata Seiden 1 y Yu den Fiber ni Okeru Denkyoku Danmen Keijo no 2-3 A Hasseiryoku eno Eikyo", 2012 NENDO THE JAPAN 4-7 SOCIETY FOR PRECISION ENGINEERING SHUNKI TAIKAI GAKUJUTSU KOENKAI KOEN RONBUNSHU, 1 March 2012 (2012-03-01), pages 701 - 702
DHELIKA RADON ET AL.: "Electrostatic chuck consisting of polymeric electrostatic inductive fibers for handling of objects with rough surfaces", SMART MATERIALS AND STRUCTURES, vol. 22, no. 9, 5 August 2013 (2013-08-05), pages 95010, XP020250004
DHELIKA RADON ET AL.: "Electrostatic chuck consisting of polymeric electrostatic inductive fibers for handling of objects with rough surfaces", SMART MATERIALS AND STRUCTURES, vol. 22, no. 9, 5 August 2013 (2013-08-05), pages 95010, XP020250004
Attorney, Agent or Firm:
AOKI, Atsushi et al. (JP)
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