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Title:
BOARD FOR MEASURING PARALLELISM BETWEEN SURFACES OF UPPER AND LOWER SURFACE PLATES, SYSTEM FOR MEASURING PARALLELISM BETWEEN SURFACES OF UPPER AND LOWER SURFACE PLATES, AND METHOD FOR ADJUSTING DISTANCE BETWEEN SURFACES OF UPPER AND LOWER SURFACE PLATES
Document Type and Number:
WIPO Patent Application WO/2007/046552
Kind Code:
A1
Abstract:
A board (3) for accurately and easily measuring a parallelism between the surfaces of upper and lower surface plates. A plurality of mounting parts for measuring units (32) are formed on a board body (31). Each of the measuring units (32) comprises a displacement mechanism part having an upward biased displacement element displacing according to the distance between the surface of an upper surface plate (21) and the surface of a lower surface plate (22), a distance-between-upper-and-lower-surface-plates measuring part for digitally measuring a displacement value A of the displacement element equivalent to a minimum distance between the surfaces of the upper surface plate (21) and the lower surface plate (22), and a measured result output part outputting the measured results by the distance-between-upper-and-lower-surface-plates measuring part (122).

Inventors:
KUROKAWA, Takashi (())
黒川 隆志 (())
TAKAHASHI, Mitsuhiro (())
Application Number:
JP2006/321448
Publication Date:
April 26, 2007
Filing Date:
October 20, 2006
Export Citation:
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Assignee:
TAKAHASHI KEISEI CORPORATION (1-35, Zao-Matsugaoka 1-chome Yamagata-sh, Yamagata 38, 9902338, JP)
株式会社高橋型精 (〒38 山形県山形市蔵王松ヶ岡一丁目1番35号 Yamagata, 9902338, JP)
KUROKAWA, Takashi (())
黒川 隆志 (())
International Classes:
G01B5/24; B26F1/40; B30B15/00; G01B5/24; B26F1/38; B30B15/00
Attorney, Agent or Firm:
HIRAISHI, Toshiko et al. (1-18-15, Nishi-Shinbashi Minato-ku, Tokyo 03, 1050003, JP)
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