Title:
BOLOMETER MATERIAL, INFRARED SENSOR, AND MANUFACTURING METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2021/241575
Kind Code:
A1
Abstract:
One purpose of this invention is to provide: a bolometer thin film having a high temperature coefficient resistance (TCR) value; an infrared sensor; and an infrared sensor manufacturing method. The present invention provides: a bolometer material that is a thin film including a semiconductor carbon nanotube and a negative thermal expansion material; and an infrared sensor comprising the bolometer material.
Inventors:
YUGE RYOTA (JP)
TANAKA TOMO (JP)
TANAKA TOMO (JP)
Application Number:
PCT/JP2021/019796
Publication Date:
December 02, 2021
Filing Date:
May 25, 2021
Export Citation:
Assignee:
NEC CORP (JP)
International Classes:
G01J1/02; H01L37/00
Domestic Patent References:
| WO2011145295A1 | 2011-11-24 |
Foreign References:
| US20140105242A1 | 2014-04-17 | |||
| JP2015049207A | 2015-03-16 | |||
| JP2011166070A | 2011-08-25 | |||
| JP2019201181A | 2019-11-21 | |||
| JP2007263769A | 2007-10-11 | |||
| US9851257B1 | 2017-12-26 | |||
| JP5717233B2 | 2015-05-13 |
Attorney, Agent or Firm:
ITO Katsuhiro (JP)
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