Title:
BOLOMETER AND METHOD FOR MANUFACTURING THE SAME
Document Type and Number:
WIPO Patent Application WO/2011/145295
Kind Code:
A1
Abstract:
Disclosed are a bolometer and a method for manufacturing the same, in which a polymer film (102) is formed on a substrate (101), a thermistor resistor (106) is formed on the polymer film (102), and an optical reflection film (104) is formed between the thermistor resistor (106) and the substrate (101). Consequently, when infrared rays or terahertz waves are incident from above, part thereof is absorbed by the thermistor resistor (106), but the majority thereof is transmitted through the polymer film (102) and is reflected by the optical reflection film (104). If the distance between the thermistor resistor (106) and the optical reflection film (104) is designated as d, optical components having a wavelength of l or less represented by d = l/4 resonate and are thereby turned into heat, and the temperature of the thermistor resistor (106) is raised. The intensity of the infrared rays or the terahertz waves is detected by detecting the change in resistance produced by the rise in temperature of the thermistor resistor (106).
Inventors:
NARITA, Kaoru (7-1 Shiba 5-chome, Minato-k, Tokyo 01, 〒1088001, JP)
Application Number:
JP2011/002632
Publication Date:
November 24, 2011
Filing Date:
May 11, 2011
Export Citation:
Assignee:
NEC CORPORATION (7-1 Shiba 5-chome, Minato-ku Tokyo, 01, 〒1088001, JP)
日本電気株式会社 (〒01 東京都港区芝五丁目７番１号 Tokyo, 〒1088001, JP)
日本電気株式会社 (〒01 東京都港区芝五丁目７番１号 Tokyo, 〒1088001, JP)
International Classes:
G01J1/02; H01C7/02; H01L37/00
Attorney, Agent or Firm:
HAYAMI, Shinji (Gotanda TG Bldg. 9F, 9-2 Nishi-Gotanda 7-chome, Shinagawa-k, Tokyo 31, 〒1410031, JP)
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Claims: