Title:
BONDING CAPILLARY
Document Type and Number:
WIPO Patent Application WO/2014/115855
Kind Code:
A1
Abstract:
This bonding capillary is characterized by containing a polycrystalline ceramic having aluminum oxide crystals as the primary phase, the occupancy rate of pores in the polycrystalline ceramic being no greater than 90 ppm, and there being no greater than 13/mm2 of pores having a diameter of 3 μm or greater. It is thus possible to increase wear resistance.
Inventors:
MOTOMURA KENICHI (JP)
ONISHI JUMPEI (JP)
SAKURAI MAMORU (JP)
HIMURO SHOICHIRO (JP)
UCHIMURA TAKESHI (JP)
GOTO TATSUYA (JP)
TABATA KENJI (JP)
ONISHI JUMPEI (JP)
SAKURAI MAMORU (JP)
HIMURO SHOICHIRO (JP)
UCHIMURA TAKESHI (JP)
GOTO TATSUYA (JP)
TABATA KENJI (JP)
Application Number:
PCT/JP2014/051576
Publication Date:
July 31, 2014
Filing Date:
January 24, 2014
Export Citation:
Assignee:
TOTO LTD (JP)
International Classes:
H01L21/60; C04B35/10
Foreign References:
| JP2005159070A | 2005-06-16 | |||
| JP2004535665A | 2004-11-25 | |||
| JP2003068784A | 2003-03-07 | |||
| JPH08245259A | 1996-09-24 | |||
| JPH08169755A | 1996-07-02 |
Attorney, Agent or Firm:
HYUGAJI, Masahiko et al. (JP)
Masahiko Hiugaji (JP)
Masahiko Hiugaji (JP)
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