Title:
BONDING DEVICE AND MAINTENANCE METHOD OF BONDING DEVICE
Document Type and Number:
WIPO Patent Application WO/2010/018621
Kind Code:
A1
Abstract:
A bonding device comprises a gun for discharging particles, a vacuum chamber in which an atmosphere for discharging the particles is created, a draw-out mechanism chamber, and a gate valve for opening/closing between the vacuum chamber and the draw-out mechanism chamber. The gun is supported such that it can move through the gate valve. Such a bonding device can move the gun from the interior of the draw-out mechanism chamber to the vicinity of an irradiation object arranged in the vacuum chamber through the gate valve and can irradiate the object with the particles more surely. Such a bonding device can take out the gun to the outside of the vacuum chamber without boosting the pressure in the vacuum chamber by closing the gate valve after moving the gun into the draw-out mechanism chamber.
Inventors:
KINOUCHI, Masato (HEAVY INDUSTRIES LTD., 8-1, Sachiura 1-chome, Kanazawa-ku, Yokohama-sh, Kanagawa 15, 23685, JP)
木ノ内 雅人 (〒15 神奈川県横浜市金沢区幸浦一丁目８番地１ 三菱重工業株式会社先進技術研究センター内 Kanagawa, 23685, JP)
TAWARA, Satoshi (HEAVY INDUSTRIES LTD., 8-1, Sachiura 1-chome, Kanazawa-ku, Yokohama-sh, Kanagawa 15, 23685, JP)
田原 諭 (〒15 神奈川県横浜市金沢区幸浦一丁目８番地１ 三菱重工業株式会社先進技術研究センター内 Kanagawa, 23685, JP)
木ノ内 雅人 (〒15 神奈川県横浜市金沢区幸浦一丁目８番地１ 三菱重工業株式会社先進技術研究センター内 Kanagawa, 23685, JP)
TAWARA, Satoshi (HEAVY INDUSTRIES LTD., 8-1, Sachiura 1-chome, Kanazawa-ku, Yokohama-sh, Kanagawa 15, 23685, JP)
田原 諭 (〒15 神奈川県横浜市金沢区幸浦一丁目８番地１ 三菱重工業株式会社先進技術研究センター内 Kanagawa, 23685, JP)
Application Number:
JP2008/064457
Publication Date:
February 18, 2010
Filing Date:
August 12, 2008
Export Citation:
Assignee:
MITSUBISHI HEAVY INDUSTRIES, LTD. (16-5, Konan 2-Chome Minato-ku Tokyo, 15, 10882, JP)
三菱重工業株式会社 (〒15 東京都港区港南二丁目１６番５号 Tokyo, 10882, JP)
KINOUCHI, Masato (HEAVY INDUSTRIES LTD., 8-1, Sachiura 1-chome, Kanazawa-ku, Yokohama-sh, Kanagawa 15, 23685, JP)
木ノ内 雅人 (〒15 神奈川県横浜市金沢区幸浦一丁目８番地１ 三菱重工業株式会社先進技術研究センター内 Kanagawa, 23685, JP)
TAWARA, Satoshi (HEAVY INDUSTRIES LTD., 8-1, Sachiura 1-chome, Kanazawa-ku, Yokohama-sh, Kanagawa 15, 23685, JP)
三菱重工業株式会社 (〒15 東京都港区港南二丁目１６番５号 Tokyo, 10882, JP)
KINOUCHI, Masato (HEAVY INDUSTRIES LTD., 8-1, Sachiura 1-chome, Kanazawa-ku, Yokohama-sh, Kanagawa 15, 23685, JP)
木ノ内 雅人 (〒15 神奈川県横浜市金沢区幸浦一丁目８番地１ 三菱重工業株式会社先進技術研究センター内 Kanagawa, 23685, JP)
TAWARA, Satoshi (HEAVY INDUSTRIES LTD., 8-1, Sachiura 1-chome, Kanazawa-ku, Yokohama-sh, Kanagawa 15, 23685, JP)
International Classes:
B23K15/00; G21K5/00; B23K20/00; B23K20/06; H01J37/067
Attorney, Agent or Firm:
KUDOH, Minoru (6F KADOYA BLDG, 24-10 Minamiooi 6-chom, Shinagawa-ku Tokyo, 140-0013, JP)
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