Title:
BOX FOR TRANSFERRING SEMICONDUCTOR WAFER
Document Type and Number:
WIPO Patent Application WO/1999/028967
Kind Code:
A1
Abstract:
A box (21) for transferring a semiconductor wafer, having an opening/closing mechanism for putting in/taking out a wafer, characterized by comprising a gas cleaning device A¿-2? which uses photoelectrons produced by irradiation with light and an optical catalyst for cleaning the interior of the box, or a gas cleaning unit which includes the gas cleaning device and a battery-mounted power source device with a function of charging the battery for supplying electric power to the gas cleaning device. Thus, the box has a practically effective function of removing fine particles and gaseous harmful components.
Inventors:
FUJII TOSHIAKI (JP)
HORITA OSAMU (JP)
OHYAMA KOUJI (JP)
NAKAYAMA TOSHIYA (JP)
SAKIYA FUMIO (JP)
KIMPARA MINEO (JP)
YOKOYAMA SIN (JP)
HIROSE MASATAKA (JP)
HORITA OSAMU (JP)
OHYAMA KOUJI (JP)
NAKAYAMA TOSHIYA (JP)
SAKIYA FUMIO (JP)
KIMPARA MINEO (JP)
YOKOYAMA SIN (JP)
HIROSE MASATAKA (JP)
Application Number:
PCT/JP1998/005369
Publication Date:
June 10, 1999
Filing Date:
November 30, 1998
Export Citation:
Assignee:
EBARA CORP (JP)
DAINICHI SHOJI K K (JP)
RORZE CORP (JP)
FUJII TOSHIAKI (JP)
HORITA OSAMU (JP)
OHYAMA KOUJI (JP)
NAKAYAMA TOSHIYA (JP)
SAKIYA FUMIO (JP)
KIMPARA MINEO (JP)
YOKOYAMA SIN (JP)
HIROSE MASATAKA (JP)
DAINICHI SHOJI K K (JP)
RORZE CORP (JP)
FUJII TOSHIAKI (JP)
HORITA OSAMU (JP)
OHYAMA KOUJI (JP)
NAKAYAMA TOSHIYA (JP)
SAKIYA FUMIO (JP)
KIMPARA MINEO (JP)
YOKOYAMA SIN (JP)
HIROSE MASATAKA (JP)
International Classes:
B65G49/00; B03C3/38; B65D81/26; B65D85/86; B65G49/07; H01L21/673; (IPC1-7): H01L21/68
Foreign References:
| JPH0629373A | 1994-02-04 | |||
| JPH04218941A | 1992-08-10 | |||
| JPH04179146A | 1992-06-25 |
Attorney, Agent or Firm:
Shamoto, Ichio (New Ohtemachi Building 2-1, Ohtemachi 2-chome Chiyoda-ku Tokyo, JP)
Download PDF:
Previous Patent: CONTAINER AND LOADER FOR SUBSTRATE
Next Patent: SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME
Next Patent: SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME