Title:
BRAGG ACOUSTIC WAVE REFLECTIVE LAYER STRUCTURE, PREPARATION METHOD THEREFOR, AND SOLIDLY MOUNTED RESONATOR
Document Type and Number:
WIPO Patent Application WO/2022/040991
Kind Code:
A1
Abstract:
Disclosed is a preparation method for a Bragg acoustic wave reflective layer structure, comprising preparing, on a substrate, each reflective layer group formed by sequentially stacking a first dielectric layer and a second dielectric layer; and performing ion injection on the second dielectric layer in the reflective layer group to increase the acoustic impedance of the second dielectric layer. Also disclosed is a Bragg acoustic wave reflective layer structure prepared by using the method. The Bragg acoustic wave reflective layer structure has a flat reflective layer, and a solidly mounted resonator comprising the Bragg acoustic wave reflective layer structure. The solidly mounted resonator further comprises a bottom electrode layer, a piezoelectric layer, and a top electrode layer which are disposed on a Bragg acoustic wave reflective layer. It is unnecessary to use etching and CMP processes for the process of the Bragg acoustic wave reflective layer structure, which greatly reduces the cost. When a high-quality high acoustic impedance dielectric reflective layer is prepared by using an ion implantation process, the generation of parasitic resistance is inhibited due to the insulativity of an undoped region. Moreover, a reflective layer of an acoustic wave resonator having high frequency and ultrahigh frequency can be obtained.
Inventors:
LI LINPING (CN)
SHENG JINGHAO (CN)
JIANG ZHOU (CN)
SHENG JINGHAO (CN)
JIANG ZHOU (CN)
Application Number:
PCT/CN2020/111487
Publication Date:
March 03, 2022
Filing Date:
August 26, 2020
Export Citation:
Assignee:
HANGZHOU XINGHE TECH CO LTD (CN)
International Classes:
H03H3/04; H03H3/02; H03H9/02; H03H9/17
Foreign References:
| US20070285191A1 | 2007-12-13 | |||
| US20180123558A1 | 2018-05-03 | |||
| CN101997512A | 2011-03-30 | |||
| EP2306641A2 | 2011-04-06 | |||
| CN103534943A | 2014-01-22 |
Attorney, Agent or Firm:
XIAMEN FEBE INTELLECTUAL PROPERTY AGENCY GP (CN)
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