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Patent Searching and Data

Document Type and Number:
WIPO Patent Application WO/2013/082092
Kind Code:
A cleaning device for cleaning substrates is provided. The device comprises a cleaning brush having an outer cleaning surface surrounding a hollow bore and positioned around a first central axis a1 defining a first rotational direction a; and a plurality of cantilevered nodules formed on the outer cleaning surface, each nodule having a mounting portion connected with the outer cleaning surface, a cleaning portion connected with the mounting portion, and a contact member for engaging the substrate. The cleaning portion extends in a first direction D1 from the mounting portion to the contact member, wherein a radial direction Dr is defined as extending radially from the central axis a1 towards the outer cleaning surface and normal to the rotational direction a, and wherein the first direction D1 intersects with the radial direction Dr at an angle y. Angle y is greater than 0° and less than 180°.

WITHERS, Bradley S. (3600 West Lake AvenueGlenview, Illinois, 60026, US)
CROKER, Michael G. (3600 West Lake AvenueGlenview, Illinois, 60026, US)
WILLIS, Robert A. (3600 West Lake AvenueGlenview, Illinois, 60026, US)
Application Number:
Publication Date:
May 08, 2014
Filing Date:
November 28, 2012
Export Citation:
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ILLINOIS TOOL WORKS INC. (155 Harlem Avenue, Glenview, Illinois, 60025, US)
International Classes:
H01L21/67; A46B9/02; A46B13/00; B08B1/04
Attorney, Agent or Firm:
HAUPTMAN, Benjamin J. (LOWE HAUPTMAN HAM & BERNER, LLP1700 Diagonal Road,Suite 30, Alexandria Virginia, 22314, US)
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