Title:
BUFFER SHEET USED IN VACUUM CHUCK THAT ADSORBS OBJECT TO BE PROCESSED
Document Type and Number:
WIPO Patent Application WO/2012/169858
Kind Code:
A2
Abstract:
Disclosed is a buffer sheet used in a vacuum chuck that adsorbs an object to be processed. The buffer sheet of the present invention is coupled to the upper side of the vacuum chuck which adsorbs and fixes the object to be processed, and includes a non-woven sheet and an ESD coating layer comprising carbon nanotube on the non-woven sheet so that the object to be processed is mounted. According to the present invention, an antistatic effect is excellent since the ESD coating layer comprising the carbon nanotube with electrical conductivity is applied.
Inventors:
LEE JAEDUK (KR)
CHOI ILHWAN (KR)
KIM SEUNGRYEOL (KR)
CHOI ILHWAN (KR)
KIM SEUNGRYEOL (KR)
Application Number:
PCT/KR2012/004597
Publication Date:
December 13, 2012
Filing Date:
June 11, 2012
Export Citation:
Assignee:
TOPNANOSYS INC (KR)
LEE JAEDUK (KR)
CHOI ILHWAN (KR)
KIM SEUNGRYEOL (KR)
LEE JAEDUK (KR)
CHOI ILHWAN (KR)
KIM SEUNGRYEOL (KR)
International Classes:
H01L21/687; B23Q3/08; C08J5/18; G02F1/13; H01L21/683
Foreign References:
| JP2007308666A | 2007-11-29 | |||
| KR20100109098A | 2010-10-08 | |||
| KR20070031892A | 2007-03-20 |
Attorney, Agent or Firm:
CHUN, Sunghoon (KR)
천성훈 (KR)
천성훈 (KR)
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Claims:
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