BULK ACOUSTIC RESONATOR AND ASSEMBLY, METHOD FOR ADJUSTING ELECTROMECHANICAL COUPLING COEFFICIENT DIFFERENCE, AND FILTER AND ELECTRONIC DEVICE

WIPO Patent Application WO/2022/062910

A1

The present disclosure relates to a bulk acoustic resonator, comprising: a substrate, an acoustic mirror, a bottom electrode, a piezoelectric layer and a top electrode, wherein the piezoelectric layer comprises a first layer and a second layer; an acoustic resistance layer is disposed between the first layer and the second layer; an inner edge of the acoustic resistance layer is on an inner side of the border of the acoustic mirror in a horizontal direction; the acoustic resistance of the acoustic resistance layer is different from that of the piezoelectric layer; and the material of the first layer is different from that of the second layer. The present disclosure further relates to a bulk acoustic resonator assembly, a method for adjusting an electromechanical coupling coefficient of a bulk acoustic resonator, a method for adjusting an electromechanical coupling coefficient difference of a resonator in a bulk acoustic resonator assembly, and a filter and an electronic device.

JPH0563495	SURFACE ACOUSTIC WAVE DEVICE
JPS5541048	SURFACE ACOUSTIC WAVE ELEMENT
WO/2010/032383	ELASTIC BOUNDARY WAVE DEVICE

PANG WEI (CN)
BAN SHENGGUANG (CN)
YANG QINGRUI (CN)
ZHANG MENGLUN (CN)

PCT/CN2021/117474

March 31, 2022

September 09, 2021

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ROFS MICROSYSTEM TIANJIN CO LTD (CN)

H03H9/25; H03H9/17

CN102811031A	2012-12-05
CN111010131A	2020-04-14
CN205657657U	2016-10-19
CN104854793A	2015-08-19
US20170310303A1	2017-10-26
US20140139077A1	2014-05-22

BEIJING JINCHENG TONGDA & NEAL LAW FIRM (CN)

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