Title:
BULK ACOUSTIC RESONATOR HAVING ACOUSTIC IMPEDANCE MISMATCH STRUCTURE, FILTER, AND ELECTRONIC APPARATUS
Document Type and Number:
WIPO Patent Application WO/2021/008186
Kind Code:
A1
Abstract:
A bulk acoustic resonator comprises: a substrate (10); an acoustic mirror (20); a bottom electrode (30) disposed on the substrate (10); a top electrode (70); a piezoelectric layer (50) disposed above the bottom electrode (30) and between the bottom electrode (30) and the top electrode (70); and an electrode support portion (85) forming a gap at least between the piezoelectric layer (50) and the top electrode (70), wherein an overlapping region of the acoustic mirror (20), the bottom electrode (30), the piezoelectric layer (50), and the top electrode (70) in a thickness direction of the resonator constitutes an effective region of the resonator. The resonator is provided with an acoustic impedance mismatch structure along at least a portion of a free edge of the top electrode (70). The invention further relates to a filter and an electronic device having the filter.
Inventors:
ZHANG MENGLUN (CN)
PANG WEI (CN)
YANG QINGRUI (CN)
PANG WEI (CN)
YANG QINGRUI (CN)
Application Number:
PCT/CN2020/086556
Publication Date:
January 21, 2021
Filing Date:
April 24, 2020
Export Citation:
Assignee:
UNIV TIANJIN (CN)
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
International Classes:
H03H9/17
Foreign References:
| CN103607178A | 2014-02-26 | |||
| CN111030636A | 2020-04-17 | |||
| CN101924529A | 2010-12-22 | |||
| CN108336982A | 2018-07-27 | |||
| CN1794572A | 2006-06-28 |
Attorney, Agent or Firm:
BEIJING JINCHENG TONGDA & NEAL LAW FIRM (CN)
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