Title:
BULK ACOUSTIC RESONATOR HAVING TEMPERATURE COMPENSATION LAYER, AND FILTER AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/135252
Kind Code:
A1
Abstract:
The present invention relates to a bulk acoustic resonator and a manufacturing method therefor. The resonator comprises: a substrate, an acoustic mirror, a bottom electrode, a top electrode, a piezoelectric layer, which is arranged between the bottom electrode and the top electrode, and a temperature compensation layer structure, which is arranged between the bottom electrode and the piezoelectric layer, wherein the temperature compensation layer structure comprises a temperature compensation layer. The resonator further comprises a protection layer, wherein at a non-electrode-connection end of the top electrode, the protection layer covers an upper surface of the temperature compensation layer structure along at least a part of the temperature compensation layer structure in a circumferential direction, a part of the upper surface of the temperature compensation layer structure is exposed from an opening defined by an inner edge of the protection layer, and the opening is at least partially located in an effective area of the resonator; and at the non-electrode-connection end of the top electrode, the inner edge of the protection layer is flush with the non-electrode-connection end of the top electrode in a horizontal direction, or is located on an inner side of the non-electrode-connection end of the top electrode. The present invention further relates to a filter and an electronic device.
Inventors:
PANG WEI (CN)
LI CONGCONG (CN)
HAO LONG (CN)
XU YANG (CN)
ZHANG MENGLUN (CN)
LI CONGCONG (CN)
HAO LONG (CN)
XU YANG (CN)
ZHANG MENGLUN (CN)
Application Number:
PCT/CN2021/138642
Publication Date:
June 30, 2022
Filing Date:
December 16, 2021
Export Citation:
Assignee:
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
International Classes:
H03H9/05; H03H9/02; H03H9/25
Foreign References:
| CN209710061U | 2019-11-29 | |||
| CN111327295A | 2020-06-23 | |||
| CN103795369A | 2014-05-14 | |||
| US20140292150A1 | 2014-10-02 |
Attorney, Agent or Firm:
BEIJING JINCHENGTONGDA & NEAL LAW FIRM (CN)
Download PDF: