Title:
BULK ACOUSTIC RESONATOR HAVING TUNGSTEN ELECTRODE, FILTER, AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/111415
Kind Code:
A1
Abstract:
The present invention relates to a bulk acoustic resonator, comprising: a substrate; an acoustic mirror; a bottom electrode; a top electrode; and a piezoelectric layer disposed between the bottom electrode and the top electrode, wherein the piezoelectric layer is a doped piezoelectric layer, and the top electrode and/or the bottom electrode is a tungsten electrode containing metal tungsten. The top electrode and/or the bottom electrode is a single-layer electrode made of metal tungsten or a single-layer electrode made of a tungsten alloy. Alternatively, the top electrode and/or the bottom electrode is a stacked electrode comprising at least two electrode layers made of different materials and arranged in a stacked manner. The at least two electrode layers include at least one tungsten electrode layer. The tungsten electrode layer is an electrode layer made of metal tungsten or an electrode layer made of a tungsten alloy. The present invention also relates to a filter having the above resonator and an electronic device having the filter or the resonator.
Inventors:
PANG WEI (CN)
ZHANG MENGLUN (CN)
NING YUAN (CN)
ZHANG MENGLUN (CN)
NING YUAN (CN)
Application Number:
PCT/CN2021/132122
Publication Date:
June 02, 2022
Filing Date:
November 22, 2021
Export Citation:
Assignee:
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
International Classes:
H03H9/17
Foreign References:
| CN110868183A | 2020-03-06 | |||
| CN111010138A | 2020-04-14 | |||
| US20150280100A1 | 2015-10-01 | |||
| CN102931941A | 2013-02-13 | |||
| CN110868185A | 2020-03-06 |
Attorney, Agent or Firm:
BEIJING JINCHENGTONGDA & NEAL LAW FIRM (CN)
Download PDF: