Title:
BULK ACOUSTIC RESONATOR WITH MASS LOADS ARRANGED ON TWO SIDES OF PIEZOELECTRIC LAYER, FILTER AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/012334
Kind Code:
A1
Abstract:
The present disclosure relates to a bulk acoustic resonator and a manufacturing method therefor. The resonator comprises: a substrate; an acoustic mirror; a bottom electrode; a top electrode; and a piezoelectric layer provided between the bottom electrode and the top electrode, wherein a first mass load array and a second mass load array are respectively provided on upper and lower sides of the piezoelectric layer. The present disclosure also relates to a filter and an electronic device.
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Inventors:
PANG WEI (CN)
YANG QINGRUI (CN)
ZHANG MENGLUN (CN)
YANG QINGRUI (CN)
ZHANG MENGLUN (CN)
Application Number:
PCT/CN2021/103693
Publication Date:
January 20, 2022
Filing Date:
June 30, 2021
Export Citation:
Assignee:
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
International Classes:
H03H9/17; H03H9/02; H03H9/56
Domestic Patent References:
| WO2011105313A1 | 2011-09-01 |
Foreign References:
| CN111934643A | 2020-11-13 | |||
| CN111030635A | 2020-04-17 | |||
| US20100052476A1 | 2010-03-04 | |||
| CN108173528A | 2018-06-15 | |||
| US20130207515A1 | 2013-08-15 |
Attorney, Agent or Firm:
BEIJING JINCHENG TONGDA & NEAL LAW FIRM (CN)
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