BULK ACOUSTIC WAVE RESONANCE DEVICE, FILTERING DEVICE AND RADIO FREQUENCY FRONT END DEVICE

Title:

BULK ACOUSTIC WAVE RESONANCE DEVICE, FILTERING DEVICE AND RADIO FREQUENCY FRONT END DEVICE

Document Type and Number:

WIPO Patent Application WO/2021/227170

Kind Code:

A1

Abstract:

Provided in the embodiments of the present invention are a bulk acoustic wave resonance device, a filtering device and a radio frequency front end device. The bulk acoustic wave resonance device comprises: a first passive part comprising a first substrate and a first heat dissipation layer, the first heat dissipation layer being located above the first substrate; a first active part comprising a first piezoelectric layer, a first electrode layer and a second electrode layer, the first piezoelectric layer being located above the first passive part and comprising a first side and a second side opposite the first side, the first passive part being located on the first side, the first electrode layer being located on the first side and between the first passive part and the first piezoelectric layer, and the second electrode layer being located on the second side; and a first cavity located on the first side and between the first passive part and the first piezoelectric layer, at least part of the first electrode layer being located on or inside the first cavity. The first heat dissipation layer can improve the heat dissipation performance of the bulk acoustic wave resonance device, or can flexibly adjust the heat dissipation performance of the whole acoustic wave resonance device.

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Inventors:

YU CHENGCHENG (CN)
CAO YANJIE (CN)
WANG WEI (CN)

Application Number:

PCT/CN2020/095515

Publication Date:

November 18, 2021

Filing Date:

June 11, 2020

Export Citation:

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Assignee:

SHENZHEN SUNWAY COMMUNICATION CO LTD (CN)

International Classes:

H03H9/19

Foreign References:

CN104753493A	2015-07-01
CN109474252A	2019-03-15
JP2007281846A	2007-10-25

Attorney, Agent or Firm:

BORSAM INTELLECTUAL PROPERTY LTD. (CN)

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