Title:
BULK ACOUSTIC WAVE RESONATOR AND MANUFACTURING METHOD THEREFOR, FILTER, AND ELECTRONIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2022/148387
Kind Code:
A1
Abstract:
The present invention relates to a bulk acoustic wave resonator, comprising: a substrate; an acoustic mirror; a bottom electrode; a piezoelectric layer, comprising at least a first layer and a second layer that are adjacent to and overlap with one another in the thickness direction, the first layer having a first thickness, and the second layer having a second thickness; and a top electrode. At least one among the first layer and the second layer is a single crystal piezoelectric layer, the resonator has an electromechanical coupling coefficient Kt2, and Kt2>10%. The present invention also relates to a method for manufacturing a bulk acoustic wave resonator, a filter, and an electronic device.
Inventors:
PANG WEI (CN)
XU YANG (CN)
ZHANG MENGLUN (CN)
XU YANG (CN)
ZHANG MENGLUN (CN)
Application Number:
PCT/CN2022/070422
Publication Date:
July 14, 2022
Filing Date:
January 06, 2022
Export Citation:
Assignee:
ROFS MICROSYSTEM TIANJIN CO LTD (CN)
International Classes:
H03H3/02
Foreign References:
| CN112134542A | 2020-12-25 | |||
| US20150326200A1 | 2015-11-12 | |||
| CN111355463A | 2020-06-30 | |||
| US20020063497A1 | 2002-05-30 | |||
| US20170288121A1 | 2017-10-05 |
Attorney, Agent or Firm:
BEIJING JINCHENGTONGDA & NEAL LAW FIRM (CN)
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