Title:
BULK ACOUSTIC WAVE RESONATOR AND METHOD FOR MANUFACTURING SAME, AND FILTER
Document Type and Number:
WIPO Patent Application WO/2020/019246
Kind Code:
A1
Abstract:
Disclosed are a bulk acoustic wave resonator and a method for manufacturing same, and a filter, wherein the bulk acoustic wave resonator comprises a substrate (201), a sound reflection unit (202) on the substrate (201), a piezoelectric stacking structure on the sound reflection unit (202), and a bonding pad (208a) on the piezoelectric stacking structure, wherein there is an overlapped region of the bonding pad (208a) and the sound reflection unit (202). By means of the bulk acoustic wave resonator and the method for manufacturing same, and the filter, the connection resistance of the bulk acoustic wave resonator is effectively reduced, so that the insertion loss of the filter can be reduced.
Inventors:
LI PING (CN)
WANG WEI (CN)
HU NIANCHU (CN)
JIA BIN (CN)
WANG WEI (CN)
HU NIANCHU (CN)
JIA BIN (CN)
Application Number:
PCT/CN2018/097237
Publication Date:
January 30, 2020
Filing Date:
July 26, 2018
Export Citation:
Assignee:
EPICMEMS XIAMEN CO LTD (CN)
International Classes:
H03H9/02; H03H9/17; H03H9/54
Foreign References:
| CN106899275A | 2017-06-27 | |||
| CN108023560A | 2018-05-11 | |||
| CN104953976A | 2015-09-30 | |||
| CN108233888A | 2018-06-29 | |||
| US20180183406A1 | 2018-06-28 |
Attorney, Agent or Firm:
CHINA SCIENCE PATENT & TRADEMARK AGENT LTD. (CN)
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