Title:
BULK ACOUSTIC WAVE RESONATOR
Document Type and Number:
WIPO Patent Application WO/2021/036758
Kind Code:
A1
Abstract:
Provided is a bulk acoustic wave resonator, comprising: a first electrode (10), a piezoelectric layer (20), and a second electrode (30), said piezoelectric layer (20) being arranged between said first electrode (10) and said second electrode (30); the piezoelectric layer (20) is provided with at least one slit (21); along the direction in which the first electrode (10) points toward the second electrode (30), said slit (21) at least runs through the piezoelectric layer (20). The slit (21) reduces the generation of transverse standing waves, thereby reducing noise and improving the performance of the bulk acoustic wave resonator.
Inventors:
MIU JIANMIN (CN)
ZHANG RUIZHEN (CN)
ZHANG RUIZHEN (CN)
Application Number:
PCT/CN2020/107912
Publication Date:
March 04, 2021
Filing Date:
August 07, 2020
Export Citation:
Assignee:
MG MICROELECTRONICS CO LTD (CN)
International Classes:
H03H9/02; H03H3/02; H03H9/15
Foreign References:
| CN110417375A | 2019-11-05 | |||
| CN210157156U | 2020-03-17 | |||
| CN104202010A | 2014-12-10 | |||
| CN109474252A | 2019-03-15 | |||
| CN108566174A | 2018-09-21 | |||
| JP2007208728A | 2007-08-16 | |||
| CN108649916A | 2018-10-12 | |||
| KR20030034639A | 2003-05-09 |
Attorney, Agent or Firm:
SHANGHAI SHENXIN LAW FIRM (CN)
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