Title:
BULK ELASTIC WAVE FILTER DEVICE
Document Type and Number:
WIPO Patent Application WO/2023/190673
Kind Code:
A1
Abstract:
Provided is a bulk elastic wave filter device having a good heat dissipation property. The bulk elastic wave filter device comprises: an acoustic multilayer film that includes, on a supporting substrate, a first layer and a second layer layered in an alternating pattern, the first layer having a prescribed characteristic acoustic impedance, the second layer having a lower characteristic acoustic impedance than the first layer; and an active element that is provided on the opposite side of the acoustic multilayer film from the supporting substrate. The active element includes a first electrode layer provided on the acoustic multilayer film, a piezoelectric layer provided on the first electrode layer, and a second electrode layer provided on the piezoelectric layer. A portion of or the entirety of the acoustic multilayer film has electrical conductivity. An insulating layer is provided between the acoustic multilayer film and the first electrode layer. In a preferable configuration example, the second layer, which has electric conductivity, has an electric resistivity of 1.0×10^-3 Ω cm or less.
Inventors:
AOKI YUZUKI (JP)
NAKAMURA DAISUKE (JP)
MACHINAGA HIRONOBU (JP)
NAKAMURA DAISUKE (JP)
MACHINAGA HIRONOBU (JP)
Application Number:
PCT/JP2023/012773
Publication Date:
October 05, 2023
Filing Date:
March 29, 2023
Export Citation:
Assignee:
NITTO DENKO CORP (JP)
International Classes:
H03H9/17
Foreign References:
| JP2005136761A | 2005-05-26 | |||
| JP2020113954A | 2020-07-27 | |||
| JP2008034925A | 2008-02-14 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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