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Title:
BULK-HEATING IN PMTJ STACK DESIGN
Document Type and Number:
WIPO Patent Application WO/2018/004612
Kind Code:
A1
Abstract:
Disclosed are magnetic tunnel junction (MTJ) devices, computing devices, and related methods. An MTJ device includes an MTJ body, an electrode, and a heating region. The heating region is disposed between the MTJ body and the electrode. A computing device includes a memory device including at least one MTJ device, which in turn includes at least one heating region between an MTJ body and at least one of a pair of electrodes. A method of forming an MTJ device includes forming an MTJ body, forming at least one electrode, and forming at least one electrically conductive heating region between the MTJ body and the at least one electrode.

Inventors:
KUO CHARLES C (US)
OGUZ KAAN (US)
DOCZY MARK L (US)
DOYLE BRIAN S (US)
O'BRIEN KEVIN P (US)
Application Number:
PCT/US2016/040466
Publication Date:
January 04, 2018
Filing Date:
June 30, 2016
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
INTEL CORP (US)
International Classes:
H01L43/02; G11C11/16; H01L43/10; H01L43/12
Foreign References:
US20150170739A12015-06-18
US20150076485A12015-03-19
US20050078510A12005-04-14
US20150214471A12015-07-30
US20140328116A12014-11-06
Attorney, Agent or Firm:
BOOTH, Brett C. (US)
Download PDF:
Claims:
Claims

1. A magnetic tunnel junction (MTJ) device, comprising:

an MTJ body, comprising:

a free region including a ferromagnetic material;

a reference region including a ferromagnetic material; and

an oxide region including an oxide material between the free region and the reference region;

an electrode comprising electrically conductive material; and

a heating region disposed between the MTJ body and the electrode.

2. The MTJ device of claim 1, wherein the heating region includes at least one chalcogenide.

3. The MTJ device of claim 2, wherein the at least at least one chalcogenide includes germanium-antimony-tellerium (GeSbTe).

4. The MTJ device of claim 1, wherein the heating region includes at least one metal.

5. The MTJ device of claim 4, wherein the at least one metal includes at least one of tungsten nitride (WN), titanium nitride (TiN), tantalum nitride (TaN), and tantalum silicon nitride (TiSiN).

6. The MTJ device according to any one of claims 1-5, further including a synthetic antiferromagnet (SAF) disposed between the reference region of the MTJ body and the heating region.

7. The MTJ device according to any one of claims 1-5, further including a synthetic antiferromagnet (SAF) disposed between the heating region and the electrode.

8. The MTJ device according to any one of claims 1-5, further including a cap region comprising an electrically conductive material disposed between the free region of the MTJ body and the heating region.

9. The MTJ device according to any one of claims 1-5, further including a cap region comprising an electrically conductive material disposed between the heating region and the electrode.

10. The MTJ device according to any one of claims 1-5, further comprising:

another electrode comprising electrically conductive material and located opposite the electrode across the MTJ body; and

another heating region disposed between the MTJ body and the other electrode.

11. The MTJ device according to any one of claims 1-5, wherein at least one of the free region and the reference region includes a metallic insert region between two CoFeB regions.

12. The MTJ device according to any one of claims 1-5, wherein the oxide region includes magnesium oxide (MgO).

13. The MTJ device according to any one of claims 1-5, further comprising at least one other heating region configured to generate heat.

14. The MTJ device according to any one of claims 1-5, wherein the heating region comprises a material that generates heat in response to an electrical current passing therethrough.

15. A method of forming a magnetic tunnel junction (MTJ) device, the method comprising:

forming an MTJ body including a free region, a reference region, and an oxide region between the free region and the reference region;

forming at least one electrode including conductive material configured to conduct electrical current at least one of to or from the MTJ body; and

forming at least one heating region between the MTJ body and the at least one electrode, the at least one heating region.

16. The method of claim 15, wherein forming the at least one heating region comprises forming the at least one heating region of a chalcogenide.

17. The method of claim 16, wherein forming the at least one heating region of a chalcogenide includes forming the at least one heating region of germanium-antimony-tellurium (GeSbTe).

18. The method of claim 15, wherein forming of the at least one heating region comprises forming the at least one heating region of a metal.

19. The method of claim 18, wherein forming the at least one heating region of a metal includes forming the at least one heating region of at least one of tungsten nitride (WN), titanium nitride (TiN), tantalum nitride (TaN), and tantalum silicon nitride (TiSiN).

20. The method according to any one of claims 15-19, wherein forming at least one heating region comprises forming a plurality of heating regions.

21. A computing device, comprising:

a memory device configured to electrically store data, the memory device including: at least one magnetic tunnel junction (MTJ) device including:

a pair of electrodes;

an MTJ body including an oxide region between a reference region and a free region, the MTJ body between the pair of electrodes; and

at least one heating region disposed between the MTJ body and at least one of the pair of electrodes.

22. The computing device of claim 21, further comprising at least one device selected from the group consisting of:

a processor mounted to a substrate, a graphics processing unit, an antenna within the computing device, a display on the computing device, a battery within the computing device, a power amplifier within the processor, and a voltage regulator within the processor.

23. The computing device of claim 21, wherein the at least one heating region is less than or equal to about 500 Angstroms thick.

24. The computing device of claim 21, wherein the at least one heating region is at least about 100 Angstroms thick.

25. The computing device according to any one of claims 21-24, wherein the memory device comprises a spin-transfer torque (STT) random access memory device.

Description:
BULK-HEATING IN PMTJ STACK DESIGN

Background

[0001] Magnetic tunnel junction (MTJ) devices (e.g., perpendicular MTJ devices, or equivalently PMTJ devices) leverage quantum mechanical effects of placing a thin electrically insulating material between two ferromagnets. Specifically, in MTJ devices, electrons tunnel from one ferromagnet to the other through the electrically insulating material. A direction of polarization of at least one of the two

ferromagnets can be independently controlled. When the directions of polarization of the two ferromagnets are the same, an electrical resistance across the MTJ device is relatively low. When the directions of polarization of the two ferromagnets are different (e.g., opposite), the electrical resistance across the MTJ device is relatively high.

[0002] One example of an MTJ device is a spin-transfer torque (STT) memory storage unit, which is the basic storage unit used in STT random access memory (STT-RAM, or STT-MRAM) devices. In STT-RAM devices, different states, including a parallel state (in which the two ferromagnets are polarized in the same direction) and an antiparallel state (in which the two ferromagnets are polarized in opposite directions) can be set by applying different electrical currents. The state can then be read by measuring the electrical resistance (e.g., by applying an electrical read current and measuring a resulting voltage drop) of the MTJ device. If the measured resistance is relatively high, it can be determined that the MTJ device is in the antiparallel state. If the measured resistance is relatively low, it can be determined that the MTJ device is in the parallel state. Different logic levels (e.g., logic levels "1" and "0") can be assigned to each of the parallel and antiparallel states, enabling digital information to be stored in arrays of MTJ devices.

Brief Description of the Drawings

[0003] FIG. 1 is a simplified cross-sectional view of an example MTJ device.

[0004] FIG. 2 is a simplified cross-sectional view of an MTJ device, according to some embodiments.

[0005] FIG. 3 is a simplified cross-sectional view of another MTJ device, according to some embodiments. [0006] FIG. 4 is a simplified cross-sectional view of yet another MTJ device, according to some embodiments.

[0007] FIG. 5 is a simplified block diagram of a memory device, according to some embodiments.

[0008] FIG. 6 is a simplified flowchart illustrating a method of forming an MTJ device, according to some embodiments.

[0009] FIG. 7 illustrates an interposer that includes one or more embodiments discussed herein.

[0010] FIG. 8 illustrates a computing device, according to some embodiments.

Detailed Description

[0011] Disclosed herein are MTJ devices, computing systems, and related methods that use Joule heating in the MTJ stack to increase heating within MTJ devices, thereby reducing a magnitude of control currents for switching the MTJ device between different operational states. In the following description, various aspects of the illustrative implementations will be described using terms commonly employed by those skilled in the art to convey the substance of their work to others skilled in the art. However, it will be apparent to those skilled in the art that the disclosure may be practiced with only some of the described aspects. For purposes of explanation, specific numbers, materials and configurations are set forth in order to provide a thorough understanding of the illustrative implementations. It will be apparent to one skilled in the art, however, that the disclosure may be practiced without the specific details. In other instances, well-known features are omitted or simplified in order not to obscure the illustrative implementations.

[0012] Various operations will be described as multiple discrete operations, in turn, in a manner that is most helpful in understanding the disclosure. The order in which the operations are presented in the description, however, should not be construed to imply that these operations are necessarily order dependent. In particular, these operations need not be performed in the order of presentation. Rather, in some embodiments, the order may be modified.

[0013] The terms "over," "under," "between," and "on" as used herein refer to a relative position of one material layer or component with respect to other layers or components. For example, one layer disposed over or under another layer may be directly in contact with the other layer or may have one or more intervening layers. Moreover, one layer disposed between two layers may be directly in contact with the two layers or may have one or more intervening layers. In contrast, a first layer "on" a second layer is in direct contact with that second layer. Similarly, unless explicitly stated otherwise, one feature disposed between two features may be in direct contact with the adjacent features or may have one or more intervening layers.

[0014] Implementations of the disclosure may be formed or carried out on a substrate, such as a semiconductor substrate. In one implementation, the semiconductor substrate may be a crystalline substrate formed using a bulk silicon or a silicon-on-insulator (SOI) substructure (e.g., silicon-on-glass (SOG), silicon-on- sapphire (SOS), etc.). In other implementations, the semiconductor substrate may be formed using alternate materials, which may or may not be combined with silicon, that include but are not limited to germanium, indium antimonide, lead telluride, indium arsenide, indium phosphide, gallium arsenide, indium gallium arsenide, gallium antimonide, or other combinations of group lll-V or group IV materials. Although a few examples of materials from which the substrate may be formed are described here, any material that may serve as a foundation upon which a semiconductor device may be built falls within the spirit and scope of the disclosure.

[0015] One or more MTJ devices (e.g., STT-RAM storage units) may be fabricated on or in a substrate. In various implementations, the MTJ devices may be described as a stack of different functional regions. This geometric structure should not, however, be interpreted as limiting. As will be apparent to those skilled in the art, MTJ devices may be formed horizontally, radially, or otherwise, as well as vertically.

[0016] FIG. 1 is a simplified cross-sectional view of an example MTJ device 100. The MTJ device 100 includes a stack 180 including an MTJ body 190 disposed between electrodes 110, 170. The MTJ body 190 includes an oxide region 140 including an oxide material (e.g., magnesium oxide (MgO)) between a reference region 150 and a free region 130. The reference region 150 and the free region 130 each include ferromagnets. By way of non-limiting example, the free region 130 may include a cobalt iron barium (CoFeB) stack including a metallic insert between two CoFeB regions. Also by way of non-limiting example, the reference region may include CoFeB.

[0017] The electrodes 110, 170 include electrically conductive material (e.g., titanium, aluminum, copper, tungsten, polysilicon, alloys, etc.). The electrodes 110, 170 are configured to conduct control currents l c through the MTJ body 190. A direction of a magnetic polarization of the free region 130 may be controllable through application of the control currents l c through the MTJ body 190. Also, a read of a current state (e.g., a parallel state, an antiparallel state) of the MTJ body 190 may be determined through application of the control currents l c through the MTJ body 190.

[0018] In some embodiments, the stack 180 includes a cap region 120 including a metal (e.g., MgO). The cap region 120 is configured to improve operational stability of the MTJ device 100. In some embodiments, the stack 180 includes a synthetic antiferromagnet (SAF) region 160 including a magnet (e.g., layers of cobalt platinum). The SAF region 160 is also configured to improve operational stability of the MTJ device 100.

[0019] In order to switch the operation state of the MTJ body 190 between the parallel and antiparallel states, the control current l c is controlled to exceed certain thresholds. These threshold current levels can often exceed a capacity that transistors have for supplying currents. An increased temperature of the MTJ body 190, however, decreases the threshold current levels for switching the MTJ body 190 between the parallel and antiparallel states. As current passes through the MTJ body 190, the oxide region 140 produces some heat. Much of this heat generated by the oxide region 140, however, escapes through the conductive regions (e.g., the cap region 120, the SAF region 160, and the electrodes 110, 170) of the MTJ stack 180. As a result, the MTJ device 100 may draw more current than a transistor is capable of supplying. [0020] Disclosed herein are MTJ devices including heating regions configured to generate heat within an MTJ body, decreasing threshold current levels for switching the MTJ body between operational states.

[0021] In some embodiments, disclosed herein is an MTJ device including an MTJ body. The MTJ body includes a free region, a reference region, and an oxide region. The free region includes a ferromagnetic material, the reference region includes a ferromagnetic material, and the oxide region includes an oxide material between the free region and the reference region. The MTJ device also includes an electrode including electrically conductive material and a heating region disposed between the MTJ body and the electrode. The heating region is configured to generate heat responsive to electrical current passing therethrough.

[0022] In some embodiments, disclosed herein is a method of forming an MTJ device. The method includes forming an MTJ body including a free region, a reference region, and an oxide region between the free region and the reference region. The method also includes forming at least one electrode including conductive material configured to conduct electrical current at least one of to or from the MTJ body. The method further includes forming at least one heating region between the MTJ body and the at least one electrode, the at least one heating region configured to generate heat responsive to the electric current passing therethrough.

[0023] In some embodiments, disclosed herein is a computing device including a memory device configured to electrically store data. The memory device includes at least one MTJ device including a pair of electrodes, an MTJ body including an oxide region between a reference region and a free region, the MTJ body between the pair of electrodes. The MTJ device also includes at least one heating region including a material configured to generate heat responsive to an electrical current passing therethrough. The at least one heating region is disposed between the MTJ body and at least one of the pair of electrodes.

[0024] FIG. 2 is a simplified cross-sectional view of an MTJ device 200, according to some embodiments. The MTJ device 200 includes an MTJ stack 280 similar to the MTJ stack 180 of FIG. 1 except that the MTJ stack 280 includes a heating region 202 ("Heating Region" 202) configured to generate heat, in addition to the heat generated by an MTJ body 290 of the MTJ device 200, thereby contributing to an overall increase in temperature of the MTJ device 200. In other words, the cap region 220 is disposed between the free region 230 of the MTJ body 290 and the heating region 202. As a result, an operational temperature of the MTJ device 200 is higher than an operation temperature of the MTJ device 100 of FIG. 1. Accordingly, lower magnitude control current l c may be used to switch the operational state of the MTJ body 290 than that used to switch the operational state of the MTJ body 190 of FIG. 1.

[0025] In some embodiments, the heating region 202 is at least about 100

Angstroms thick. In some embodiments, the heating region 202 is less than or equal to about 500 Angstroms thick.

[0026] In some embodiments, the heating region 202 includes a material configured to generate heat responsive to electrical current passing therethrough. Multiple heating regions may be used to generate a relatively large increase in temperature, leading to increased temperatures in the MTJ free region 230 during a write operation. By way of non-limiting example, the MTJ stack 280 may include multiple heating regions (e.g., at least two), which include materials known to facilitate Joule heating. By way of non-limiting example, the materials that facilitate Joule heating may include chalcogenides (e.g., germanium-antimony-tellurium (GeSbTe)), metals (e.g., titanium nitride (TiN), titanium silicon nitride (TiSiN), tungsten nitride (WN), and tantalum nitride (TaN)), or combinations thereof.

[0027] In embodiments where the heating region 202 includes multiple regions within the MTJ stack 280, the multiple regions are designed to increase heat generation, thereby raising a temperature in the free region. As a result, self-heating temperature rise caused by Joule heating across the oxide region 240 and heating regions 202 reduce the magnitude of the control current l c to switch between operational states of the MTJ body 290. The greater the number of heating regions 202, the greater the resulting heat generation.

[0028] The MTJ device 200 includes the MTJ body 290 including a reference region 250, a free region 230, and an oxide region 240 between the reference region 250 and the free region 230, similar to the reference region 150, the oxide region 140, and the free region 130 discussed above with reference to FIG. 1. The MTJ device 200 also includes electrodes 210, 270, similar to the electrodes 110, 170 of FIG. 1. In some embodiments, the MTJ device 200 further includes one or more of a cap region 220 and a SAF region 260, similar to the cap region 120 and the SAF region 160 of FIG. 1.

[0029] In some embodiments, a heating region may be included between other components of the MTJ stack 280 other than, or in addition to, between the cap region 220 and the SAF region 260. Such heating regions may be included between any of the components shown in the MTJ stack 280. FIGS. 3 and 4 illustrate two such examples. As another non-limiting example, the SAF 260 may be disposed between the heating region 202 and the electrode 270. As a further non-limiting example, the cap region 220 may be disposed between the heating region 202 and the electrode 210. Other examples will be apparent to those of ordinary skill in the art in view of the disclosure.

[0030] FIG. 3 is a simplified cross-sectional view of another MTJ device 300, according to some embodiments. The MTJ device 300 includes an MTJ stack 380 that is similar to the MTJ stack 280 of FIG. 2 except that the MTJ stack 380 includes a heating region 302 between the SAF region 260 and the electrode 270 in addition to the heating region 202 between the cap region 220 and the electrode 210. With the additional heating region 302, the temperature will be higher in the free region 230 of the MTJ device 300 than in the free region 230 of the MTJ device 200 of FIG. 2.

[0031] FIG. 4 is a simplified cross-sectional view of yet another MTJ device 400, according to some embodiments. The MTJ device 400 includes an MTJ stack 480 that is similar to the MTJ stack 280 of FIG. 2 except that the MTJ stack 380 includes a heating region 402 between the SAF region 260 and the electrode 270 instead of the heating region 202 between the cap region 220 and the electrode 210. In other words, the SAF region 260 is disposed between the reference region of the MTJ body and the heating region 402.

[0032] FIG. 5 is a simplified block diagram of a memory device 500, according to some embodiments. The memory device 500 includes memory control circuitry 510 operably coupled to an array of cells 520. At least one of the cells in the array of cells 520 includes an MTJ device 200, 300, 400 (FIGS. 2, 3, and 4) including at least one heating region 202, 302, 402 (FIGS. 2, 3, and 4), as discussed above.

[0033] The memory control circuitry 510 is configured to provide control currents l c (e.g., read currents, write currents, etc.) to the array of cells 520. Since at least one of the cells in the array of cells 520 includes a heating region 202, 302, 402, the memory control circuitry 510 may be configured to provide write currents of less magnitude than if no heating region 202, 302, 402 were included. Accordingly, in some embodiments, the memory control circuitry may supply write currents driven by a single transistor.

[0034] FIG. 6 is a simplified flowchart illustrating a method 600 of forming an MTJ device 200, 300, 400, according to some embodiments. Referring to FIGS. 2, 3, 4, and 6 together, the method 600 includes forming 610 an MTJ body 290 including a free region 230, a reference region 250, and an oxide region 240 between the free region 230 and the reference region 250.

[0035] The method 600 also includes forming 620 at least one electrode 210, 270 including conductive material configured to conduct electrical current at least one of to or from the MTJ body 290.

[0036] The method 600 further includes forming 630 at least one electrically conductive heating region 202, 302, 402 between the MTJ body 290 and the at least one electrode 210, 270. In some embodiments, forming 630 the at least one heating region 202, 302, 402 includes forming at least one material configured to heat responsive to electrical current passing therethrough. In some embodiments, forming 630 the at least one heating region 202, 302, 402 includes forming at least one heating region of a chalcogenide (e.g., GeSbTe). In some embodiments, forming 630 the at least one heating region 202, 302, 402, includes forming at least one heating region of at least one metal (e.g., titanium nitride (TiN), titanium silicon nitride(TiSiN), tungsten nitride (WN), and tantalum nitride (TaN)).

[0037] FIG. 7 illustrates an interposer 1000 that includes one or more embodiments discussed herein. The interposer 1000 is an intervening substrate used to bridge a first substrate 1002 to a second substrate 1004. The first substrate 1002 may be, for instance, an integrated circuit die. The second substrate 1004 may be, for instance, a memory module (e.g., the memory device 500 of FIG. 5), a computer motherboard, or another integrated circuit die. Generally, the purpose of an interposer 1000 is to spread a connection to a wider pitch or to reroute a connection to a different connection. For example, an interposer 1000 may couple an integrated circuit die to a ball grid array (BGA) 1006 that can subsequently be coupled to the second substrate 1004. In some embodiments, the first and second substrates 1002/1004 are attached to opposing sides of the interposer 1000. In other embodiments, the first and second substrates 1002/1004 are attached to the same side of the interposer 1000. And in further embodiments, three or more substrates are interconnected by way of the interposer 1000.

[0038] The interposer 1000 may be formed of an epoxy resin, a fiberglass-reinforced epoxy resin, a ceramic material, or a polymer material such as polyimide. In further implementations, the interposer 1000 may be formed of alternate rigid or flexible materials that may include the same materials described above for use in a semiconductor substrate, such as silicon, germanium, and other group lll-V and group IV materials.

[0039] The interposer 1000 may include metal interconnects 1008 and vias 1010, including but not limited to through-silicon vias (TSVs) 1012. The interposer 1000 may further include embedded devices 1014, including both passive and active devices. Such devices include, but are not limited to, capacitors, decoupling capacitors, resistors, inductors, fuses, diodes, transformers, sensors, and

electrostatic discharge (ESD) devices. More complex devices such as radio-frequency (RF) devices, power amplifiers, power management devices, antennas, arrays, sensors, and MEMS devices may also be formed on the interposer 1000.

[0040] In accordance with embodiments of the disclosure, apparatuses or processes disclosed herein may be used in the fabrication of interposer 1000.

[0041] FIG. 8 illustrates a computing device 1200, according to some embodiments. The computing device 1200 may include a number of components. In one embodiment, these components are attached to one or more motherboards. In an alternate embodiment, some or all of these components are fabricated onto a single system-on-a-chip (SoC) die, such as an SoC used for mobile devices. The

components in the computing device 1200 include, but are not limited to, an integrated circuit die 1202 and at least one communications logic unit 1208. In some implementations the communications logic unit 1208 is fabricated within the integrated circuit die 1202 while in other implementations the communications logic unit 1208 is fabricated in a separate integrated circuit chip that may be bonded to a substrate or motherboard that is shared with or electronically coupled to the integrated circuit die 1202. The integrated circuit die 1202 may include a CPU 1204 as well as on-die memory 1206, often used as cache memory, that can be provided by technologies such as embedded DRAM (eDRAM), SRAM, or spin-transfer torque memory (STT-MRAM) (e.g., such as the memory device 500 of FIG. 5).

[0042] Computing device 1200 may include other components that may or may not be physically and electrically coupled to the motherboard or fabricated within an SoC die. These other components include, but are not limited to, volatile memory 1210 (e.g., DRAM), non-volatile memory 1212 (e.g., ROM or flash memory, the memory device 500 of FIG. 5, etc.), a graphics processing unit 1214 (GPU), a digital signal processor 1216, a crypto processor 1242 (e.g., a specialized processor that executes cryptographic algorithms within hardware), a chipset 1220, at least one antenna 1222 (in some implementations two or more antenna may be used), a display or a touchscreen display 1224, a touchscreen controller 1226, a battery 1229 or other power source, a power amplifier (not shown), a voltage regulator (not shown), a global positioning system (GPS) device 1228, a compass (not shown), a motion coprocessor or sensors 1232 (that may include an accelerometer, a gyroscope, and a compass), a microphone (not shown), a speaker 1234, a camera 1236, user input devices 1238 (such as a keyboard, mouse, stylus, and touchpad), and a mass storage device 1240 (such as hard disk drive, compact disk (CD), digital versatile disk (DVD), and so forth). The computing device 1200 may incorporate further transmission, telecommunication, or radio functionality not already described herein. In some implementations, the computing device 1200 includes a radio that is used to communicate over a distance by modulating and radiating electromagnetic waves in air or space. In further implementations, the computing device 1200 includes a transmitter and a receiver (or a transceiver) that is used to communicate over a distance by modulating and radiating electromagnetic waves in air or space.

[0043] The communications logic unit 1208 enables wireless communications for the transfer of data to and from the computing device 1200. The term "wireless" and its derivatives may be used to describe circuits, devices, systems, methods, techniques, communications channels, etc., that may communicate data through the use of modulated electromagnetic radiation through a non-solid medium. The term does not imply that the associated devices do not contain any wires, although in some embodiments they might not. The communications logic unit 1208 may implement any of a number of wireless standards or protocols, including but not limited to Wi-Fi (IEEE 802.11 family), WiMAX (IEEE 802.16 family), IEEE 802.20, long term evolution (LTE), Ev-DO, HSPA+, HSDPA+, HSUPA+, EDGE, GSM, GPRS, CDMA, TDMA, DECT, Infrared (IR), Near Field Communication (NFC), Bluetooth, and derivatives thereof, as well as any other wireless protocols that are designated as 3G, 4G, 5G, and beyond. The computing device 1200 may include a plurality of communications logic units 1208. For instance, a first communications logic unit 1208 may be dedicated to shorter range wireless communications such as Wi-Fi, NFC, and Bluetooth and a second communications logic unit 1208 may be dedicated to longer range wireless communications such as GPS, EDGE, GPRS, CDMA, WiMAX, LTE, Ev-DO, and others.

[0044] In some embodiments, the processor 1204 of the computing device 1200 includes one or more devices, such as MTJ devices 200, 300, 400, that are formed in accordance with embodiments disclosed herein. The term "processor" may refer to any device or portion of a device that processes electronic data from registers and/or memory to transform that electronic data into other electronic data that may be stored in registers and/or memory.

[0045] The communications logic unit 1208 may also include one or more devices, such as MTJ device 200, 300, 400, that are formed in accordance with embodiments disclosed herein.

[0046] In further embodiments, another component housed within the computing device 1200 may contain one or more devices, such as MTJ device 200, 300, 400, that are formed in accordance with implementations disclosed herein. [0047] In various embodiments, the computing device 1200 may be a laptop computer, a netbook computer, a notebook computer, an ultrabook computer, a smartphone, a dumbphone, a tablet, a tablet/laptop hybrid, a personal digital assistant (PDA), an ultra mobile PC, a mobile phone, a desktop computer, a server, a printer, a scanner, a monitor, a set-top box, an entertainment control unit, a digital camera, a portable music player, or a digital video recorder. In further

implementations, the computing device 1200 may be any other electronic device that processes data.

Examples

[0048] The following is a list of example embodiments that fall within the scope of the disclosure. In order to avoid complexity in providing the disclosure, not all of the examples listed below are separately and explicitly disclosed as having been contemplated herein as combinable with all of the others of the examples listed below and other embodiments disclosed hereinabove. Unless one of ordinary skill in the art would understand that these examples listed below, and the above disclosed embodiments, are not combinable, it is contemplated within the scope of the disclosure that such examples and embodiments are combinable.

[0049] Example 1: A magnetic tunnel junction (MTJ) device, including: an MTJ body, including: a free region including a ferromagnetic material; a reference region including a ferromagnetic material; and an oxide region including an oxide material between the free region and the reference region; an electrode including electrically conductive material; and a heating region disposed between the MTJ body and the electrode.

[0050] Example 2: The MTJ device of Example 1, wherein the heating region includes at least one chalcogenide.

[0051] Example 3: The MTJ device of Example 2, wherein the at least at least one chalcogenide includes germanium-antimony-tellerium (GeSbTe).

[0052] Example 4: The MTJ device of Example 1, wherein the heating region includes at least one metal. [0053] Example 5: The MTJ device of Example 4, wherein the at least one metal includes at least one of tungsten nitride (WN), titanium nitride (TiN), tantalum nitride (TaN), and tantalum silicon nitride (TiSiN).

[0054] Example 6: The MTJ device according to any one of Examples 1-5, further including a synthetic antiferromagnet (SAF) disposed between the reference region of the MTJ body and the heating region.

[0055] Example 7: The MTJ device according to any one of Examples 1-6, further including a synthetic antiferromagnet (SAF) disposed between the heating region and the electrode.

[0056] Example 8: The MTJ device according to any one of Examples 1-7, further including a cap region including an electrically conductive material disposed between the free region of the MTJ body and the heating region.

[0057] Example 9: The MTJ device according to any one of Examples 1-8, further including a cap region including an electrically conductive material disposed between the heating region and the electrode.

[0058] Example 10: The MTJ device according to any one of Examples 1-9, further including: another electrode including electrically conductive material and located opposite the electrode across the MTJ body; and another heating region disposed between the MTJ body and the other electrode.

[0059] Example 11: The MTJ device according to any one of Examples 1-10, wherein at least one of the free region and the reference region includes a metallic insert region between two CoFeB regions.

[0060] Example 12: The MTJ device according to any one of Examples 1-11, wherein the oxide region includes magnesium oxide (MgO).

[0061] Example 13: The MTJ device according to any one of Examples 1-12, further including at least one other heating region configured to generate heat.

[0062] Example 14: The MTJ device according to any one of Examples 1-13, wherein the heating region includes a material that generates heat in response to an electrical current passing therethrough.

[0063] Example 15: A method of forming a magnetic tunnel junction (MTJ) device, the method including: forming an MTJ body including a free region, a reference region, and an oxide region between the free region and the reference region;

forming at least one electrode including conductive material configured to conduct electrical current at least one of to or from the MTJ body; and forming at least one heating region between the MTJ body and the at least one electrode.

[0064] Example 16: The method of Example 15, wherein forming the at least one heating region includes forming the at least one heating region of a chalcogenide.

[0065] Example 17: The method of Example 16, wherein forming the at least one heating region of a chalcogenide includes forming the at least one heating region of germanium antimony-tellurium (GeSbTe).

[0066] Example 18: The method of Example 15, wherein forming of the at least one heating region includes forming the at least one heating region of a metal.

[0067] Example 19: The method of Example 18, wherein forming the at least one heating region of a metal includes forming the at least one heating region of at least one of tungsten nitride (WN), titanium nitride (TiN), tantalum nitride (TaN), and tantalum silicon nitride (TiSiN).

[0068] Example 20: The method according to any one of Examples 15-19, wherein forming at least one heating region includes forming a plurality of heating regions.

[0069] Example 21: A computing device, including: a memory device configured to electrically store data, the memory device including: at least one magnetic tunnel junction (MTJ) device including: a pair of electrodes; an MTJ body including an oxide region between a reference region and a free region, the MTJ body between the pair of electrodes; and at least one heating region including a material disposed between the MTJ body and at least one of the pair of electrodes.

[0070] Example 22: The computing device of Example 21, further including at least one device selected from the group consisting of: a processor mounted to a substrate, a graphics processing unit, an antenna within the computing device, a display on the computing device, a battery within the computing device, a power amplifier within the processor, and a voltage regulator within the processor.

[0071] Example 23: The computing device according to any one of Examples 21 and 22, wherein the at least one heating region is less than or equal to about 500 Angstroms thick. [0072] Example 24: The computing device according to any one of Examples 21-23, wherein the at least one heating region is at least about 100 Angstroms thick.

[0073] Example 25: The computing device according to any one of Examples 21-24, wherein the memory device includes a spin-transfer torque (STT) random access memory device.

[0074] Example 26: A method of operating a magnetic tunnel junction (MTJ) device, the method including: applying an electrical control current to an electrode of the MTJ device, the electrode including electrically conductive material, the electrical control current configured to at least one of control and detect an operational state of an MTJ body of the MTJ device; and generating heat with a heating region disposed between the MTJ body and the electrode.

[0075] Example 27: The method of Example 26, wherein generating heat with a heating region includes generating the heat with a heating region including at least one chalcogenide.

[0076] Example 28: The method of Example 27, wherein generating the heat with a heating region including at least one chalcogenide includes generating the heat with a heating region including germanium-antimony-tellerium (GeSbTe).

[0077] Example 29: The method of Example 26, wherein generating heat with a heating region includes generating the heat with a heating region including at least one metal.

[0078] Example 30: The method of Example 29, wherein generating the heat with a heating region including at least one metal includes generating the heat with at least one of tungsten nitride (WN), titanium nitride (TiN), tantalum nitride (TaN), and tantalum silicon nitride (TiSiN).

[0079] Example 31: The method according to any one of Examples 26-30, wherein generating heat with a heating region includes generating the heat with a heating region separated from the MTJ body by a synthetic antiferromagnet (SAF).

[0080] Example 32: The method according to any one of Examples 26-31, wherein generating heat with a heating region includes generating the heat with a heating region separated from the electrode by a synthetic antiferromagnet (SAF). [0081] Example 33: The method according to any one of Examples 26-32, wherein generating heat with a heating region includes generating the heat with a heating region separated from the MTJ body by a cap region including an electrically conductive material.

[0082] Example 34: The method according to any one of Examples 26-33, wherein generating heat with a heating region includes generating the heat with a heating region separated from the electrode by a cap region including an electrically conductive material.

[0083] Example 35: The method according to any one of Examples 26-34, further including: conducting the electrical control current with another electrode including electrically conductive material and located opposite the electrode across the MTJ body; and generating heat with another heating region disposed between the MTJ body and the other electrode.

[0084] Example 36: The method according to any one of Examples 26-35, further including conducting the electrical control current to the MTJ device including a free region, a reference region, and an insulating region between the free region and the reference region, at least one of the free region and the reference region including a metallic insert region between two CoFeB regions.

[0085] Example 37: The method of Example 36, wherein the insulating region includes magnesium oxide (MgO).

[0086] Example 38: The method according to any one of Examples 26-37, further including generating heat with at least one other heating region.

[0087] Example 39: The method according to any one of Examples 26-38, wherein generating heat with a heating region includes generating the heat responsive to the electrical control current passing through the heating region.

[0088] Example 40: A magnetic tunnel junction (MTJ) device, including: an MTJ body including a free region, a reference region, and an oxide region between the free region and the reference region; at least one electrode including conductive material configured to conduct electrical current at least one of to or from the MTJ body; and at least one heating region between the MTJ body and the at least one electrode. [0089] Example 41: The MTJ device of Example 40, wherein the at least one heating region includes at least one chalcogenide.

[0090] Example 42: The MTJ device of Example 41, wherein the at least one chalcogenide includes gemanium-antimony-tellerium (GeSbTe).

[0091] Example 43: The MTJ device of Example 40, wherein the at least one heating region includes at least one metal.

[0092] Example 44: The MTJ device of Example 43, wherein the at least one metal includes at least one of tungsten nitride (WN), titanium nitride (TiN), tanatlum nitride (TaN), and tantalum silicon nitride (TiSiN).

[0093] Example 45: The MTJ device according to any one of Examples 40-44, wherein the at least one heating region includes a plurality of heating regions.

[0094] Example 46: A method of assembling a computing device, the method including: providing a memory device configured to electrically store data, the memory device including: at least one magnetic tunnel junction (MTJ) device including: a pair of electrodes; an MTJ body including an oxide region between a reference region and a free region, the MTJ body between the pair of electrodes; and at least one heating region including a material configured to generate heat responsive to an electrical current passing therethrough, the at least one heating region disposed between the MTJ body and at least one of the pair of electrodes.

[0095] Example 47: The method of Example 46, further including adding at least one device selected from the group consisting of: a processor mounted to a substrate, a graphics processing unit, an antenna within the computing device, a display on the computing device, a battery within the computing device, a power amplifier within the processor, and a voltage regulator within the processor.

[0096] Example 48: The method according to any one of Examples 46 and 47, wherein providing a memory device including at least one heating region includes providing the memory device including at least one heating region that is less than or equal to about 500 Angstroms thick.

[0097] Example 49: The method according to any one of Examples 47-49, wherein providing a memory device including at least one heating region includes providing the memory device including at least one heating region that is at least about 100 Angstroms thick.

[0098] Example 50: The method according to any one of Examples 46-49, wherein providing a memory device includes providing a spin-transfer torque (STT) random access memory device.

[0099] Example 51: A non-transitory computer-readable storage medium including computer-readable instructions stored thereon, the computer-readable instructions configured to instruct a processor to perform at least a portion of the method according to any one of Examples 15-19, 26-39, and 46-50.

[0100] Example 50: A means for performing the method according to any one of Examples 15-19, 26-39, and 46-50.

[0101] The above description of illustrated implementations of the disclosure, including what is described in the Abstract, is not intended to be exhaustive or to limit the disclosure to the precise forms disclosed. While specific implementations of, and examples for, the disclosure are described herein for illustrative purposes, various equivalent modifications are possible within the scope of the disclosure, as those skilled in the relevant art will recognize.