Title:
CABLE PROTECTION APPARATUS AND LITHOGRAPHIC DEVICE
Document Type and Number:
WIPO Patent Application WO/2019/105406
Kind Code:
A1
Abstract:
Disclosed in the present invention are a cable protection apparatus and a lithographic device. The cable protection apparatus is used for protecting a cable connected to an electric control box, and comprises a baffle structure; the baffle structure is located between the cable and a barrier to isolate the cable from the barrier; the baffle structure is rotatably connected to the electric control box connected to the cable; when the electric control box is moved, the baffle structure can slide with respect to the barrier. According to the present invention, severe friction between a cable and a barrier can be effectively avoided, an electric control box is prevented from jamming, and the cable is protected.
Inventors:
GUAN BORAN (CN)
Application Number:
PCT/CN2018/118119
Publication Date:
June 06, 2019
Filing Date:
November 29, 2018
Export Citation:
Assignee:
SHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD (CN)
International Classes:
H05K5/02
Domestic Patent References:
| WO2016019782A1 | 2016-02-11 |
Foreign References:
| CN204230804U | 2015-03-25 | |||
| CN205772374U | 2016-12-07 | |||
| CN106099658A | 2016-11-09 |
Attorney, Agent or Firm:
SHANGHAI SAVVY INTELLECTUAL PROPERTY AGENCY (CN)
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