CALIBRATION METHOD FOR OPTICAL ROTATION PROBE

Title:

CALIBRATION METHOD FOR OPTICAL ROTATION PROBE

Document Type and Number:

WIPO Patent Application WO/2022/202533

Kind Code:

A1

Abstract:

Provided is a calibration method for an optical rotation probe, whereby the emission direction of measurement light emitted from the optical rotation probe can be calibrated with high accuracy. The calibration method comprises: a changing step in which the emission direction of the measurement light emitted from the optical rotation probe is changed by a minute angle Δs from a preset reference direction; an acquisition step in which, after the changing step is performed, a shape error of a reference object is acquired by emitting the measurement light from the optical rotation probe toward the reference object while changing the relative positions of the optical rotation probe and the reference object while rotating the emission direction of the measurement light about an S axis; and an adjustment error calculation step in which an adjustment error of the emission direction of the measurement light with respect to the reference direction is calculated on the basis of a theoretical value of the shape error of the reference object and the measurement value, obtained in the acquisition step, of the shape error of the reference object, wherein the theoretical value is obtained when the emission direction of the measurement light coincides with the reference direction.

Inventors:

KAWATA YOSHIYUKI (JP)

Application Number:

PCT/JP2022/011900

Publication Date:

September 29, 2022

Filing Date:

March 16, 2022

Export Citation:

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Assignee:

TOKYO SEIMITSU CO LTD (JP)

International Classes:

G01B11/24

Domestic Patent References:

WO2017006848A1	2017-01-12
WO2011120526A1	2011-10-06

Foreign References:

JP2019074470A	2019-05-16
JP2017187335A	2017-10-12
JP2020098180A	2020-06-25
JP2016024086A	2016-02-08
JP2018084434A	2018-05-31

Other References: