Title:
CALIBRATION STANDARD MEMBER, METHOD FOR MANUFACTURING THE MEMBER, AND SCANNING ELECTRONIC MICROSCOPE USING THE MEMBER
Document Type and Number:
WIPO Patent Application WO/2010/052840
Kind Code:
A1
Abstract:
Provided is a standard member for performing highly precisely a magnification calibration to be used in an electronic microscope.
A plane direction (110) or (100) silicon substrate containing a magnification calibration pattern composed of a periodic pattern of a constant pitch size and a plane direction (110) or (100) silicon substrate containing not the periodic pattern of the constant pitch size but an optical-axis adjusting pattern are joined by using no adhesive and by aligning the plane directions of the two substrates with each other. Next, the joined substrates are cleaved or diced so that the (111) plane or (110) plane thereof may be sectional surfaces, and one of the periodic patterns of the individual patterns is selectively etched to form the standard member which has a corrugated periodic pattern of a constant pitch size on a section having no any step and any damage on a super lattice pattern and being perpendicular to the substrate surface.
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Inventors:
NAKAYAMA, Yoshinori (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
中山義則 (〒01 東京都国分寺市東恋ヶ窪一丁目２８０番地株式会社日立製作所中央研究所内 Tokyo, 〒1858601, JP)
TASE, Takashi (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
中山義則 (〒01 東京都国分寺市東恋ヶ窪一丁目２８０番地株式会社日立製作所中央研究所内 Tokyo, 〒1858601, JP)
TASE, Takashi (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
Application Number:
JP2009/005562
Publication Date:
May 14, 2010
Filing Date:
October 22, 2009
Export Citation:
Assignee:
HITACHI HIGH-TECHNOLOGIES CORPORATION (24-14, Nishi Shinbashi 1-chome Minato-k, Tokyo 17, 〒1058717, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
NAKAYAMA, Yoshinori (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
中山義則 (〒01 東京都国分寺市東恋ヶ窪一丁目２８０番地株式会社日立製作所中央研究所内 Tokyo, 〒1858601, JP)
株式会社日立ハイテクノロジーズ (〒17 東京都港区西新橋一丁目２４番１４号 Tokyo, 〒1058717, JP)
NAKAYAMA, Yoshinori (HITACHI LTD., 280, Higashikoigakubo 1-chome, Kokubunji-sh, Tokyo 01, 〒1858601, JP)
中山義則 (〒01 東京都国分寺市東恋ヶ窪一丁目２８０番地株式会社日立製作所中央研究所内 Tokyo, 〒1858601, JP)
International Classes:
G01B15/00; G01B1/00; G01B3/30; G01N23/225; H01J37/28
Attorney, Agent or Firm:
Polaire I.P.C. (7-1Hatchobori 2-chome, Chuo-ku Tokyo, 32, 〒1040032, JP)
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