Title:
CALIBRATION SYSTEM AND CALIBRATION METHOD FOR OPTICAL PHASED ARRAY CHIPS
Document Type and Number:
WIPO Patent Application WO/2022/126867
Kind Code:
A1
Abstract:
A calibration system and calibration method for optical phased array chips (107). The calibration system comprises a stage module (105), an infrared microscopic observation module (101), an arrayed drive control module (103), a two-dimensional beam scan module (104), a photoelectric conversion module (102), and a host computer. Compensation is carried out using beam position search and a phased array phase error. The calibration system is based on the principle of optical path reversibility, emits a laser plane wave from a current angle that needs calibration to input same into an optical phased array chip (107) in reverse, maximizes a reverse output power in a bus waveguide of the optical phased array chip using the calibration method so as to complete voltage calibration at a target angle. The present application achieves a high degree of automation, a fast calibration speed, and strong compatibility, and facilitates batch testing and calibration of optical phased array chips (107).
Inventors:
LU LIANGJUN (CN)
XU WEIHAN (CN)
ZHOU LINJIE (CN)
CHEN JIANPING (CN)
LIU JIAO (CN)
XU WEIHAN (CN)
ZHOU LINJIE (CN)
CHEN JIANPING (CN)
LIU JIAO (CN)
Application Number:
PCT/CN2021/079671
Publication Date:
June 23, 2022
Filing Date:
March 09, 2021
Export Citation:
Assignee:
UNIV SHANGHAI JIAOTONG (CN)
International Classes:
G01S7/497
Domestic Patent References:
| WO2018218003A1 | 2018-11-29 | |||
| WO2002097382A2 | 2002-12-05 |
Foreign References:
| CN108363051A | 2018-08-03 | |||
| CN112051560A | 2020-12-08 | |||
| CN112034657A | 2020-12-04 | |||
| CN111948626A | 2020-11-17 |
Attorney, Agent or Firm:
SHANGHAI HENGHUI INTELLECTUAL PROPERTY AGENCY (CN)
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