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Title:
CALORIC EFFECT ELEMENT, HEAT TRANSFER DEVICE, SEMICONDUCTOR MANUFACTURING DEVICE, AND CALORIC EFFECT ELEMENT CONTROL METHOD
Document Type and Number:
WIPO Patent Application WO/2022/044835
Kind Code:
A1
Abstract:
This caloric effect element includes: a container comprising a first wall and a second wall opposing the first wall; an ionic liquid that is accommodated in the container; a first electrode disposed on an outer surface of the first wall; and a movable electrode disposed in the ionic liquid so as to be movable therein.

Inventors:
AKIYAMA KOJI (JP)
NAGAI HIROYUKI (JP)
IWASHITA MITSUAKI (JP)
UEDA HIROKAZU (JP)
Application Number:
PCT/JP2021/029761
Publication Date:
March 03, 2022
Filing Date:
August 12, 2021
Export Citation:
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Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L37/00; F25B21/02
Domestic Patent References:
WO2017038988A12017-03-09
WO2014034374A12014-03-06
Foreign References:
JP2020120474A2020-08-06
JPH04190572A1992-07-08
JP2016023878A2016-02-08
US20130147314A12013-06-13
JP2015523681A2015-08-13
US20090218910A12009-09-03
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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