Title:
CANTILEVER CONTROL DEVICE
Document Type and Number:
WIPO Patent Application WO/2006/080257
Kind Code:
A1
Abstract:
A cantilever control device which, in an atomic force microscope, can prevent a cantilever self-excited oscillation from stopping and also prevent a cantilever probe from contacting an object of measurement. In an atomic force microscope, a cantilever control device (1) comprises a cantilever (10) having a probe (12), an actuator (20) for bringing the cantilever (10) into self-excited oscillation, an oscillation speed detector (30) for detecting a cantilever (10) oscillation speed, a displacement calculator (32) for calculating a cantilever (10) oscillation displacement, and a controller (40) for generating a signal for driving the actuator (20), wherein a feedback control signal S is equal to (K-G·x2)·dx/dt; where x is a cantilever (10) oscillation displacement, dx/dt is a cantilever (10) oscillation speed, and K and G are both positive-value feedback gains.
Inventors:
Kuroda, Masaharu c/o National Institute of Advanced Industrial Science and Technology (2-1 Namiki 1-chom, Tsukuba-shi Ibaraki, 305-8564, JP)
Yabuno, Hiroshi c/o University of Tsukuba (1-1 Tennodai 1-chom, Tsukuba-shi Ibaraki, 305-8577, JP)
Yabuno, Hiroshi c/o University of Tsukuba (1-1 Tennodai 1-chom, Tsukuba-shi Ibaraki, 305-8577, JP)
Application Number:
PCT/JP2006/300872
Publication Date:
August 03, 2006
Filing Date:
January 20, 2006
Export Citation:
Assignee:
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY (3-1 Kasumigaseki 1-chome, Chiyoda-ku, Tokyo, 100-8921, JP)
UNIVERSITY OF TSUKUBA (1-1 Tennodai 1-chome, Tsukuba-shi, Ibaraki, 305-8577, JP)
Kuroda, Masaharu c/o National Institute of Advanced Industrial Science and Technology (2-1 Namiki 1-chom, Tsukuba-shi Ibaraki, 305-8564, JP)
Yabuno, Hiroshi c/o University of Tsukuba (1-1 Tennodai 1-chom, Tsukuba-shi Ibaraki, 305-8577, JP)
UNIVERSITY OF TSUKUBA (1-1 Tennodai 1-chome, Tsukuba-shi, Ibaraki, 305-8577, JP)
Kuroda, Masaharu c/o National Institute of Advanced Industrial Science and Technology (2-1 Namiki 1-chom, Tsukuba-shi Ibaraki, 305-8564, JP)
Yabuno, Hiroshi c/o University of Tsukuba (1-1 Tennodai 1-chom, Tsukuba-shi Ibaraki, 305-8577, JP)
International Classes:
G01B21/30; G01Q10/04; G01Q60/24; G01Q60/32; G05D19/02
Attorney, Agent or Firm:
Mori, Tetsuya (Nichiei Kokusai Tokkyo Jimusho, Yusen Iwamotocho Bldg. 8th Floor 3-3,
Iwamoto-cho 2-chom, Chiyoda-ku Tokyo, 101-0032, JP)
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