Login| Sign Up| Help| Contact|

Patent Searching and Data


Title:
CANTILEVER LINEAR MOTION REFERENCE DEVICE EMPLOYING TWO-LAYER AIR SUSPENSION
Document Type and Number:
WIPO Patent Application WO/2019/214197
Kind Code:
A1
Abstract:
A cantilever linear motion reference device employing two-layer air suspension. By means of a two-layer force sealed air suspension structure, the invention realizes two-dimensional air suspension support and motion guiding and improves the rotational stiffness per unit for an air suspension working surface. By combining accurate driving and feedback control, the invention achieves high speed, high acceleration, high frequency motion, and enables construction of a small-volume, long cantilever, high torque load two-dimensional motion reference device.

Inventors:
WU, JianWei (Yu Deng, No. 92 West Da Zhi Stree, Harbin Heilongjiang 1, 150001, CN)
WEN, ZhongPu (Yu Deng, No. 92 West Da Zhi Stree, Harbin Heilongjiang 1, 150001, CN)
HU, PengCheng (Yu Deng, No. 92 West Da Zhi Stree, Harbin Heilongjiang 1, 150001, CN)
ZHANG, Yin (Yu Deng, No. 92 West Da Zhi Stree, Harbin Heilongjiang 1, 150001, CN)
CUI, JiWen (Yu Deng, No. 92 West Da Zhi Stree, Harbin Heilongjiang 1, 150001, CN)
TAN, JiuBin (Yu Deng, No. 92 West Da Zhi Stree, Harbin Heilongjiang 1, 150001, CN)
Application Number:
CN2018/114970
Publication Date:
November 14, 2019
Filing Date:
November 12, 2018
Export Citation:
Click for automatic bibliography generation   Help
Assignee:
HARBIN INSTITUTE OF TECHNOLOGY (Yu Deng, No. 92 West Da Zhi Stree, Harbin Heilongjiang 1, 150001, CN)
International Classes:
G03F7/20
Foreign References:
CN108594603A2018-09-28
CN1701925A2005-11-30
CN103062284A2013-04-24
JPH11166990A1999-06-22
JP2004342987A2004-12-02
US7289194B22007-10-30
Other References:
DING, LIANGLIANG ET AL.: "Design and Control of Air Bearing Precision Positioning Stage Driven by Liner Motor", MACHINERY & ELECTRONICS, 30 April 2011 (2011-04-30), pages 35, ISSN: 1001-2257
Attorney, Agent or Firm:
HARBIN SHINEIP INTELLECTUAL PROPERTY AGENCY CO., LTD. (Yu Deng, Room E501 Building 18, Science And Technology 1st Street No. 99, District Songbe, Harbin Heilongjiang 8, 150028, CN)
Download PDF: