Title:
CANTILEVER AND METHOD FOR MANUFACTURING CANTILEVER
Document Type and Number:
WIPO Patent Application WO/2017/159062
Kind Code:
A1
Abstract:
A cantilever 1 to be used in a scanning probe microscope includes a supporting section 10, a lever section 20, and a protruding section 30, i.e., a probe, and a crystalline carbon composite layer 60 is deposited on a leading end portion of the protruding section 30, said crystalline carbon composite layer containing a crystalline carbon nano material, and a metal material having a melting point MP of 420°C or lower.
Inventors:
TANEMURA MASAKI (JP)
VISHWAKARMA RATNESHKUMAR RITESHKUMAR (JP)
BIN ROSMI MOHAMAD SAUFI (JP)
BIN YAAKOB YAZID (JP)
WAKAMATSU YUJI (JP)
KITAZAWA MASASHI (JP)
VISHWAKARMA RATNESHKUMAR RITESHKUMAR (JP)
BIN ROSMI MOHAMAD SAUFI (JP)
BIN YAAKOB YAZID (JP)
WAKAMATSU YUJI (JP)
KITAZAWA MASASHI (JP)
Application Number:
PCT/JP2017/002804
Publication Date:
September 21, 2017
Filing Date:
January 26, 2017
Export Citation:
Assignee:
NAT UNIV CORP NAGOYA INST OF TECH (JP)
OLYMPUS CORP (JP)
OLYMPUS CORP (JP)
International Classes:
G01Q70/14; G01Q70/16
Domestic Patent References:
| WO2014011954A1 | 2014-01-16 |
Foreign References:
| CN104360107A | 2015-02-18 |
Attorney, Agent or Firm:
ITOH Susumu (JP)
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