Title:
CANTILEVER-TYPE PROBE FOR PROBE CARD
Document Type and Number:
WIPO Patent Application WO/2024/062559
Kind Code:
A1
Abstract:
This cantilever-type probe (20) for a probe card comprises a seat part (21D), a needle point part (22), and a beam part (21B) between the seat part (21D) and the needle point part (22). The beam part (21B) comprises, in the longitudinal direction (Z) thereof, a plurality of stress distribution sections (21R, 21Bh) where greater stress concentration occurs than in other portions of the beam part (21B).
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Inventors:
TAJIMA SHOHEI (JP)
Application Number:
PCT/JP2022/035188
Publication Date:
March 28, 2024
Filing Date:
September 21, 2022
Export Citation:
Assignee:
JAPAN ELECTRONIC MAT CORPORATION (JP)
International Classes:
G01R1/067
Foreign References:
| JP2014013184A | 2014-01-23 | |||
| JPH10123173A | 1998-05-15 | |||
| JP2010513870A | 2010-04-30 | |||
| JP2006284292A | 2006-10-19 | |||
| JP2008503734A | 2008-02-07 | |||
| JP2012052887A | 2012-03-15 | |||
| JP2010534851A | 2010-11-11 | |||
| JP2006189370A | 2006-07-20 | |||
| US20190064215A1 | 2019-02-28 | |||
| US20130082729A1 | 2013-04-04 | |||
| CN1822341A | 2006-08-23 |
Attorney, Agent or Firm:
PALMO PATENT FIRM, P.C. (JP)
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