Title:
CANTILEVER
Document Type and Number:
WIPO Patent Application WO/2017/006397
Kind Code:
A1
Abstract:
A cantilever 1 that is for use in a scanning probe microscope that is provided with a support part 10, with a lever part 20 that is provided so as to extend from the support part 10, with a protruding part 30 that is formed on a free-end side of the lever part 20 and that has an acute vertex angle, and with a probe 40 that is formed at the tip of the protruding part 30 and that is a thin wire 41 that has been coated with a functional film 42. The long axis/short axis ratio of the cross-sectional shape of the probe 40 is smaller than the long axis/short axis ratio of the cross-sectional shape of the thin wire 41.
Inventors:
KITAZAWA MASASHI (JP)
ARIMA MICHITSUGU (JP)
TANEMURA MASAKI (JP)
ARIMA MICHITSUGU (JP)
TANEMURA MASAKI (JP)
Application Number:
PCT/JP2015/069311
Publication Date:
January 12, 2017
Filing Date:
July 03, 2015
Export Citation:
Assignee:
NAT UNIV CORP NAGOYA INST OF TECH (JP)
OLYMPUS CORP (JP)
OLYMPUS CORP (JP)
International Classes:
G01Q60/56; G01Q60/54; G01Q70/10
Foreign References:
| JP2012233845A | 2012-11-29 | |||
| US6121771A | 2000-09-19 | |||
| JP2006267113A | 2006-10-05 |
Attorney, Agent or Firm:
ITOH Susumu (JP)
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